Ulvac C15T, Instruction Manual, Page: 49 / 63

Compressor Unit Instruction Manual
ULVAC CRYOGENICS INCORPORATED A-3
Table A-2 Operating Log
CRYOPUMP S/N
CRYO-U
®
OPERATING
LOG
POWER
Ｖ× φ
COMPRESSOR S/N
REFRIGERATOR S/N
Measuring condition Compressor unit
Cryopump
Remarks
Temperature Pressure
Da
te T
im
e
M
ea
s
ur
er
R
oom
t
em
p.
【
℃
】
H
u
m
id
it
y
【
%
】
ET
M H
igh
p
re
ss
ur
e h
el
ium
ga
s
【
M
Pa
G
】
C
ur
rent
【
Ａ
】
C
ool
in
g w
at
er
fl
o
w
r
a
te
【
L
/m
in
(*)
】
1
st
stage 2
nd
stage
【
Pa
】
K
ther
m
oc
o
upl
e
M
BS
-C
H
2
V
P e
tc
(*) Measure cooling water flow rate with flow meters for each compressor unit.