6
1
2
3
4
5
6
1
2
3
4
5
6
1
2
3
4
5
6
3 Installation
3.1 Anschlüsse
3.1.1 Signaleingänge 4 - 20 mA
Grobvakuum VSC
SubD,
Pin 4:
Pin 7:
Pin 9:
9pol, weibl.
4-20 mA
24 VDC, max. 5W
AGND
Feinvakuum VSP
SubD,
Pin 3:
Pin 7:
Pin 9:
9pol, weibl.
4-20 mA
15 VDC, max. 5W
AGND
3.1.2 Signaleingang 0 - 10 V
Amphenol
Pin 1:
(Pin 2:)
Pin 3:
Pin 4:
Pin 5:
Pin 6:
C91E, 6pol, weibl.
Identifikation
(Analog Out,
0-10V,max.10k
Ω
siehe Kap. 3.1.3 !)
Signaleingang,
0-10V
GND
24 VDC, max. 5W
AGND
3 Installation
3.1 Connectors
3.1.1 Signal Input 4 - 20 mA
Rough Vacuum VSC
SubD,
Pin 4:
Pin 7:
Pin 9:
9pole, female
4-20 mA
24 VDC, max. 5W
AGND
Fine Vacuum VSP
SubD,
Pin 3:
Pin 7:
Pin 9:
9pole, female
4-20 mA
15 VDC, max. 5W
AGND
3.1.2 Signal Input 0 - 10 V
Amphenol
Pin 1:
(Pin 2:)
Pin 3:
Pin 4:
Pin 5:
Pin 6:
C91E, 6pole, female
identification
(analog out,
0-10V, max. 10k
Ω
see chap. 3.1.3 !)
signal input,
0-10V
GND
24 VDC, max. 5W
AGND
3 Installation
3.1 Connecteurs
3.1.1 Entrées de Signaux 4-20 mA
Vide grossier VSC
SubD,
Pin 4:
Pin 7:
Pin 9:
9 pôles, femelle
4-20 mA
24 VDC, max. 5W
AGND
Vide poussé VSP
SubD,
Pin 3:
Pin 7:
Pin 9:
9 pôles, femelle
4-20 mA
15 VDC, max. 5W
AGND
3.1.2 Entrée de Signaux 0-10 V
Amphenol
Pin 1:
(Pin 2:)
Pin 3:
Pin 4:
Pin 5:
Pin 6:
C91E,
6 pôles, femelle
Identification
(Sortie analog.
0-10V, max. 10k
Ω
--> chap. 3.1.3 !)
Entrée de si-
gnaux, 0-10V
Terre
24 VDC, max. 5W
AGND
1
2
3
4
5
6
7
8
9
1
2
3
4
5
6
7
8
9
1
2
3
4
5
6
7
8
9
1
2
3
4
5
6
7
8
9
1
2
3
4
5
6
7
8
9
1
2
3
4
5
6
7
8
9