Rev F Dec 2018
Appendix C Specifications
Page 44
Appendix C Specifications
C.1 Specifications
Parameter
Value
Piezoelectric Output (SMC Male)
Voltage Output
75 V, 100 V, and 150 V DC/channel
Output Current
500 mA
Voltage Stability
100ppm over 24 hours (after 30 mins warm up time)
Noise
<3m V RMS
Typical Piezo Capacitance
1 to 10 µF
Bandwidth
10 kHz (1 µF Load, 1 V
p-p
)
External Input (BNC)
Input Type
Differential or Single Ended
Input Voltage for Full Range
(i.e. 75 V, 100 V or 150 V)
10 V ±2%
Max Output
75 V Range: -10V to 90 V DC
100 V Range: -10V to 115 V DC
150 V Range: -10 V to 159 V DC
Position Feedback (9-Pin D-Type Female)
Feedback Transducer Type*
Strain Gauge or Capacitive Sensor
Detection Method
AC Bridge (18 kHz Excitation)
Typical Resolution
5 nm (for 20 µm Actuator e.g. PAZ005)
Auto-Configure
Ident Resistance or Stage ID EEPROM in Actuator
User Input/Output (D-type 15 Pin Female)
4 Digital Inputs
TTL Levels
4 Digital Outputs
Open Collector
Trigger Input/Output
TTL
Trigger Input Functionality
Triggered Voltage Ramps/Waveforms
Trigger Output Functionality
Trigger Generation during Voltage Ramps Output
User 5V (with Ground)
250 mA Max
Input Power Requirements (IEC Connector)
Voltage
85-264 VAC
Power
150 VA
Fuse
3.15 A
USB Port
Version 2.0 Full Speed Compatible
