Chapter |
Connection Specifications
Confidential, limited rights
PN AA83838 | Revision C | 11-Mar-2019
ARL EQUINOX 100
Page
18
5.3.2 Gas Impurities Specifications
The impurity levels are given in volumetric [ppm].
Argon > 99.9996 %
Ethane (C
2
H
6
) > 99.9 %
O
2
< 0.5
O
2
< 10
H
2
O < 2
H
2
O< 5
N
2
< 0.5
N
2
< 40
H
2
< 0.01
H
2
< 5
C
n
H
m
< 0.2
C
n
H
m
< 20
CO+CO
2
< 0.1
CO
2
< 10
C
2
H
4
< 400
CH
4
< 10
5.3.3 Environment
The instrument is rated as a Pollution Degree 2 (PD2) equipment. For disposal, follow the
legal requirements of your country.
