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Chapter |
General Information
Confidential, limited rights
PN AA83838 | Revision C | 11-Mar-2019
ARL EQUINOX 100
Page
13
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Power: The electrical connection should be done by qualified personnel only.
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Vacuum: It is recommended to use a peristaltic pump in order to achieve vacuum in the
optic chamber. This will minimize the background noise and preserve the quality of the
layering of the mirror.
•
Gas in: Gas in allows to connect the instrument to an external gas cylinder.
•
Gas out: Gas out is the exhaust of the detector flush. By using the "flow va lve" it is
possible to close the flushing and lower the gas consumption.
•
RJ45: The RJ45 connector serves to connect the instrument to a computer using the
TCP/IP protocol.
SERVICE!
The service engineer can connect the X-Ray video for beam alignment. The use of
this connector is explained in the Service Guide.
4.3 ARL EQUINOX 100 Inside View
Sensitive components are protected by appropriate sensors to avoid radiation exposur e:
optical line assembly, alignment tooling, door and panels. The picture describes the main
goniometric components of the instrument.
1 - CPS180, curved position sensitive detector
2 - Low power X-Ray source
3 - Shutter
4 - Elliptical mirror
5 - Crossed slits
6 - Anti-scattering knife
7 - Sample holder (SSRT type)
8 - Beam stop
9 - Safety sensor for service tasks
10 - Source alignment system