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thermionics laboratory, inc  
3kW Rod fed e-gun manual Page 4

 

      

 

 
 

 

OPERATION 

 

CRUCIBLE PREPARATION 

 
Cleanliness is critical for high quality films and trouble free operation. CLEAN the crucible 
thoroughly before each new material is used. Heavy buildup of the previous material on 
the crucible can cause contamination of the melt. The crucible should be cleaned with an 
abrasive pad (“scotch bright”) and then vacuumed out. It should then be wiped out with 
acetone and alcohol. Cleaning by glass bead blasting is another alternative. When using 
a glass bead blaster make sure to keep the air pressure at 40psi. The source should be 
disassembled prior to glass bead blasting and special attention should be given to 
removal of all glass from the parts after cleaning (glass is a dielectric material and will 
cause severe arcing if left on the source).  Inspect the crucible bore and ensure that it is 
clear of any material that may prevent advancement of the material rod.

 

 

CHOOSING EVAPORATION MATERIAL 

 
Material for evaporation comes in a variety of forms and purities. Typically the process 
will determine purity. The Rod fed eGun requires material in a rod form. This material 
form is readily available and allows you to advance the material as the material is 
evaporated.  Recommended sizes: RCRF-0325: 0.245 +0.000”/-0.005”; RCRF-0338:  
0.374 +0.000”/-0,005” 
 

LOADING THE CRUCIBLE 

 
Running the e-Gun with 

an empty crucible will destroy the source

. Insert the rod into 

the crucible and slide it until it seats in the coupling on the linear feedthrough.  Retract the 
rod until 2-3 mm is left showing above the crucible. 

 
 
 
 
 
 
   
 
 
 
 
 
 
 
 
 
 
 

Summary of Contents for e-Gun RCRF-0325

Page 1: ...laboratory inc 3kW Rod fed e gun manual Page 1 Model RCRF 0325 0338 3 kW Rod Fed e Gun Evaporation Source Manual Thermionics Laboratory Inc Modesto CA 95351 Phone 209 529 8357 Fax 209 529 8449 www the...

Page 2: ...tion source uses a beam of focused electrons to vaporize material in a high vacuum environment The vaporized material then condenses on an object called a substrate in the same high vacuum chamber to...

Page 3: ...t 1 gpm at 50 psi C High Voltage power supply TLI model 150 0040 or equivalent TO INSTALL THE E GUN SYSTEM 1 Mount the e gun in the chamber Make sure that the source is grounded to the chamber 2 Conne...

Page 4: ...given to removal of all glass from the parts after cleaning glass is a dielectric material and will cause severe arcing if left on the source Inspect the crucible bore and ensure that it is clear of a...

Page 5: ...r supply slowly bring up voltage to negative 4 200 volts DC 8 Turn on the emission current and slowly increase the potentiometer until you see a slight glow on the tip of the rod This will normally ap...

Page 6: ...will in many cases still see some hazing on the e gun source this is normal during evaporation As the e gun becomes coated with these materials hazing may increase e GUN SHUT DOWN Once the desired rat...

Page 7: ...etween the beam former and the anode should be checked to assure a spacing of 040 inches 8 When looking down on the filament you should see 1 3rd of the filament exposed The filament beam former and a...

Page 8: ...the original manufacturer s warranties This warranty does not extend to Thermionics products that have been subject to misuse neglect accident or improper application nor shall it extend to units tha...

Page 9: ...us to determine the cause of failure In all cases Thermionics has sole responsibility for determining the cause of failure and sole discretion in determining the nature and extent of adjustment if an...

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