LN0534E2107B0
Vaporizer Unit Instruction Manual
VU-0450N Series
Safety Precautions
Incorrect handling can cause serious injury or death.
(1)
Before connecting the fittings, check that no damage or defects are found
on the fittings. Make connections properly and make sure that a leak test is
conducted before actual operation to prevent liquid and gas from leaking
into the atmosphere.
(2)
DO NOT apply any corrosive fluid to materials exposed to liquid and gas.
Corrosion may cause liquid or gas to leak into the atmosphere. Please
confirm the physical properties of liquid or gas before using.
(3)
This device is not designed as an explosion-proof structure. DO NOT use
this device in a place where explosion-proof structures are required. Doing
so may cause fire or explosion.
(4)
Prepare temperature controller unit when operating Vaporizer/Heat Exchanger
and do not set the temperature over than maximum operating temperature.
Wring temperature setting may cause fire or destruction of the device. It is
recommended to add abnormal overheating detector if necessary.
(5)
This device must be earthed before use. Otherwise, there is the rink of
electric shock.
(6)
Thermal switch is equipped in Vaporizer/Heat Exchanger to prevent
overheating. However, the operating temperature of thermal switch would
vary due to operating conditions and ambient temperature.
(7)
Attach/remove connector and terminals, please make sure that power
supply turning off. It may cause fire or shock hazard.
Incorrect handling can cause medium or
slight injury or
may cause
damage to, or loss of, facilities or equipment.
(1)
Observe the precautions listed in the WARNING (above).
(2)
Not using the voltage can cause fire, damage to sensors or malfunction or
cause electric shock.
(3)
This device is not designed to be waterproof. DO NOT locate this product
outdoors or in a place where it may be splashed with water. Doing so may
cause fire, trouble or malfunction of this product.
(4)
DO NOT modify this product. It may cause fire or other problems.
(5)
A warm-up period of 60 minutes is recommended after reaching the set
temperature. Otherwise, the output gas temperature will be low.
(6)
This device is a precious device, please handle it carefully. Dropping
down or handling it carelessly will cause damage. Please use assist
instrument while moving or setting the device.
(7)
Depends on the character of the liquid and process condition, the temperature
of tube, carrier gas, and the VU, also the flow rate of carrier gas should be
set properly.
(8)
Please use Helium (He) to pressure liquid. It easily lead to bubbles if use N2,
Ar, O2, etc, that have higher than Helium (He) solubility to pressure.
(9)
Regular maintenance is recommended for the steady use of this product.
This product uses a seal
material made from the Kalrez®, in order to
reduce leakage, Changing the seals annually is recommended. The
maintenance cycle changes according to precursor type and operating
conditions, so please consult about the maintenance cycle for the steady use
of this device.
1. Introduction
This instruction manual explains the basic operation of Vaporizer unit
VU-0450N
series(Hereafter called “VU”). Please read
through this manual carefully to
become familiar with the features of this device.
2. Features
The VU has the following features.
(1)
By using the VU in combination with the liquid mass flow meter
(Hereafter called “LM”) and the gas mass flow controller (Hereafter
called “MFC”), precise flow control and effective vaporization can be
assured.
(2)
The functions details of LM are described in the special function
manual.
(3)
It is vaporized by carrier gas (atomizer gas).
Use a MFC to control the gas flow rate.
3. Specification/ Dimensions
(1) Specification
Product name
Vaporizer
Model name
VU-0450N
Precursor Type
All type of precursor (In corrosive precursor)
Power
supply
L01:
AC100 to 120V
L02:
AC200 to 240V
Heater
L01:800W
L02:800W
Thermal switch (Note1)
Over 230
±
10°C OPEN
Return operating temperature 200±15°C CLOSE
Electrical rating (With resistance load)
AC125V/15A,250V/10A
Min:1A
Maxi mu m op eratin g t emp eratu re o f VU
200°C
Withstanding pressure (Gauge pressure)
1 MPa(G)
Leak integrity (External Leak)
Less than 1.0×10
-11
Pa·m
3
/sec (He)
Fittings
Precursor inlet
3.2mm (1/8”) VCR female
Carrier gas inle t
6.35mm (1/4”) VCR male
Vapor outlet
12.7mm (1/2”) VCR female
Th ermocou pl e for t emp eratu re cont roll er
K Type × 1piece
Reco mmen d ed t emp eratu re cont ro ll er
PID control
Wetted materials
StainlessSteel316L, Au, Ni-Co, Polyimide (SP-1) or PEEK
Mounting direction
Liquid inlet and gas outlet line :
horizontal.
Connector vertical and up.
(Please confirm the outline dimension drawing)
Standard
accessories
Thermocouple
connector
CMP01-K (RKC) ×1
Heater/Thermal
switch connector
SRCN6A16-7S
(JAE) ×1
LM-VU connect
cable
CC-LV-3-3M
×1
Note1) The temperature of thermal switch may be different from the temperature of a point of
controlling of VU.
(2) Dimensions
(This figure is for "Valve type C: Control valve stand-alone type")
Figure1 Externa l dimens ions and components
