Getting Started
37
MIRA3 FEG-SEM
9.
At higher magnifications (>10kx) it is necessary to check if astigmatism (Figure
24 (a), (b)) is precisely corrected (Figure 24 (c)). To correct astigmatism click on the
Stigmator function in the Info Panel (Figure 21). For precise correction use the Focus
window (in the SEM Scanning window) and the F11 and F12 keys in the same way
as in point 7.
10.
Select the appropriate scanning speed and save the image.
11.
Clicking on the icon
open the dialog for saving the current adjustment of the
microscope. It is possible to restore the saved adjustment of the microscope later.
Figure 22
Figure 23
Figure 24
(a)
(b)
(c)
Summary of Contents for MIRA3
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