Contents
1
MIRA3 FEG-SEM
Contents
Contents ........................................................................................................................... 1
1
Introduction ............................................................................................................... 3
2
Safety Information ...................................................................................................... 4
3
Installation and Microscope Repairs ............................................................................ 5
3.1
Transport and Storage .............................................................................................. 5
3.2
Installation Instructions ............................................................................................ 5
3.3
Fuse Replacement ..................................................................................................... 5
3.4
Instrument Repair and the Spare Parts Usage ............................................................ 5
4
Description of the Microscope .................................................................................... 6
4.1
Electron Column ....................................................................................................... 6
4.1.1
Electron Column Displaying Modes................................................................... 9
4.1.2
Electron Column Centering ............................................................................. 14
4.1.2.1
Centering of the Electron Gun ..................................................................... 14
4.1.2.2
Automatic Centering ................................................................................... 15
4.1.2.3
Manual Centering ........................................................................................ 15
4.1.2.4
Electron Column Precentering ..................................................................... 16
4.1.3
Angular Intensity Calibration .......................................................................... 17
4.2
Chamber and Sample Stage .................................................................................... 20
5
Vacuum Modes ........................................................................................................ 21
5.1
High Vacuum Mode ................................................................................................. 21
5.2
Low Vacuum Mode .................................................................................................. 21
6
Detectors ................................................................................................................. 22
6.1
SE Detector ............................................................................................................. 22
6.2
In-Beam SE Detector ............................................................................................... 22
6.3
LVSTD Detector ....................................................................................................... 23
6.4
BSE Detector ........................................................................................................... 24
6.5
CL Detector ............................................................................................................. 24
6.5.1
Exchange of CL for BSE Lightguide ................................................................. 24
6.6
Other Detectors ...................................................................................................... 25
7
Control Elements ...................................................................................................... 26
7.1
Keyboard ................................................................................................................ 26
7.2
Mouse ..................................................................................................................... 26
7.3
Trackball ................................................................................................................. 27
Summary of Contents for MIRA3
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