Getting Started
33
MIRA3 FEG-SEM
11.
To magnify the image click on the Magnification icon
on the Toolbar and turn
the Trackball from left to right.
12.
Once the area of interest is magnified and focused as desired, right-click on the
Speed icon
on the Toolbar and select appropriate scanning speed.
13.
Clicking on the Acquire button in the Info Panel (Figure 15) or on the icon
on the Toolbar saves the image. Fill in the note, sign and description field
if necessary. Choose a folder in which to store the image. To change the parameters
of the image use the Image Parameters function in the main SEM menu.
14.
Clicking on the icon
opens the dialog for saving the actual adjustment of the
microscope, which can be opened and used later.
Figure 15
8.4
Imaging in Low Vacuum Mode
An ordinary SE detector is not available in the low vacuum operations (see chapter 6),
therefore Tescan has developed the LVSTD detector that gives topographical information
from the sample in low vacuum. The BSE detector is available for both modes (LowVac,
HiVac) and gives compositional information.
1.
Insert the final aperture into the objective according to the instructions in chapter 9.2
or in the help file in the MiraTC software.
2.
Switch the microscope to low vacuum mode (pressure range 7 Pa - 500 Pa) using the
UniVac button in the Low Vacuum Mode panel (Figure 16).
3.
Enter the desired pressure value in the field next to the UniVac button and click
on the OK button.
4.
Switch on the LVSTD detector by clicking on the LVSTD button in the Low Vacuum
Mode panel (see Figure 17). This button is present if the LVSTD detector is attached
to the chamber.
Summary of Contents for MIRA3
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