Description of the Microscope
20
MIRA3 FEG-SEM
4.2
Chamber and Sample Stage
The chamber is a sealed space under the column for placing your specimen for investigation.
The specimen is fixed on the sample stage, thus allowing you to move your sample during
the investigation process. The chamber must be evacuated during investigation.
Manipulators have
electrically isolated specimen holders
. The specimen holder is connected
to pA-meter. The pA-meter also works as an acoustic contact indicator of the specimen
to the chamber. If contact between the specimen holder and the chamber body occurs, all
motorized axes will stop and an audible sound will indicate the contact (touch alarm).
The chamber and sample stage types:
Type
Motorized axes
Eucentricity
LM
X, Y, Z, Rotation, Tilt
automatic
XM
X, Y, Z, Rotation, Tilt
automatic
GM
X, Y, Z, Rotation, Tilt
automatic
The eucentric position is such a position of the specimen, where the observed area of the
sample does not move when the sample itself is tilted. The auto-eucentric function can be
activated by checking the Keep view field box in the Stage Control panel in the MiraTC
software.
Summary of Contents for MIRA3
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