0101-8604-0, Rev. F
i
FC-3800 F & I Guide
TABLE OF CONTENTS
Section
Page
Table of Contents......................................................................................... i
Safety Instructions for Operating and Service Personnel ............................ iii
Special Amendment for U.K. Users: Electrical Safety Precautions ............. iv
User Responsibility.......................................................................................v
Guidelines and Good Practices ....................................................................v
Health Hazard ............................................................................................. vi
1
INTRODUCTION AND SITE PREPARATION CHECKLIST
1.1
Scope and Purpose of this Guide............................................................... 1-1
1.2 T
emescal Contact information.................................................................... 1-1
1.3
General Safety Information......................................................................... 1-2
1.4
Site Preparation Checklist .......................................................................... 1-2
2 FACILITY
REQUIREMENTS
2.1 Enviro
nment ............................................................................................... 2-1
2.2 Wate
r ......................................................................................................... 2-1
2.3 Compressed
Gases.................................................................................... 2-2
2.4 Electrical
Power Requirements .................................................................. 2-2
2.5 Electrical
Grounding Requirements............................................................ 2-3
3
UNPACKING and INSTALLATION
3.1
Unpacking by Customer ..............................................................................3-1
3.2
Customer’s Site Preparation Responsibilities..............................................3-2
3.3
Temescal Installation Responsibilities.........................................................3-5
3.4
Installation Drawings................................................................................... 3-7
LIST OF ILLUSTRATIONS
Fig. Number
Page
2-1
Facility and System Grounding Requirements
2-4
2-2
Vacuum Cubicle Grounding for Simba 2 Power Supply
2-5
2-3
Low-Z Grounding Requirements on Systems with a CV-6SLX or CV-12SLX Power Supply
2-6
3-1
Elevation View of Vacuum Cubicle, Showing Vacuum Cubicle Height
3-7
3-2
System Plan View, Showing Dimensions of Main System Components
3-8
3-3
Utility Connection Points on Rear of Vacuum Cubicle
3-9
3-4
Routing of Customer-Supplied Service Lines in 208-V Installations
3-10
3-5
Routing of Customer-Supplied Service Lines in 400-V Installations
3-11
3-6
Routing of Temescal-Supplied Helium Lines to Cryopump Compressors
3-12
3-7
Routing of Control/Data Cables on Systems with the Simba 2 Power Supply
3-13
3-8
Routing of Electrical Power Cables on Systems with the Simba 2 Power Supply
3-14
3-9
Routing of EMO Cables and Copper Straps on Systems with the Simba 2 Power Supply
3-15
3-10
Routing of Power and Control/Data Cables on Systems With Either the CV-6SLX
or the CV-12SLX Power Supply
3-16
3-11
Routing of EMO Cables and Copper Grounding Straps on Systems With Either
the CV-6SLX or the CV-12SLX Power Supply
3-17
