Section 1: Introduction and Site Prep. Checklist
FC-3800 Facility and Installation Guide
FC-3800 F & I Guide
1-4
0101-8604-0, Rev. F
Compressed Gases:
For additional details, see section 2.3.
Vent Gas:
Clean Dry Air (CDA) and/or Nitrogen (N
2
) (recommended)
60 to 120 psig (4.14 to 8.27 bar)
Pneumatic Air:
90 to 120 psig (6.21 to 8.27 bar)
Helium:
One bottle, 99.999% pure.
Optional Process Gas:
Argon, 99.995% minimum purity
3 to 3 sccm (for FC ion beam source without PBN) or
5 to 8 sccm (for FC beam ion source with PBN)
Electrical:
For additional information, see sections 2.4 and 2.5.
Ground:
Good earth ground, low impedance to RF as well as DC. For illustrations
and additional details, see section 2.4.
Main System (Drop #1)
208 VAC, 60 Hz, 3-phase 4-wire, 150 A
or
400 VAC, 50 Hz, 3-phase 4-wire, 90 A
HV Power Supply (Drop #2)
(Select one power supply only)
Simba 2
208/240 VAC, 50/60 Hz, 3-phase delta, 4-wire, 90 A
Simba 2
380 VAC, 50/60 Hz, 3-phase delta, 60 A current)
Simba 2
480 VAC, 50/60 Hz, 3-phase delta, 50 A
CV-6SLX
208 VAC, 50/60 Hz, 3-phase 4-wire, 30 A
CV-6SLX
400 VAC, 50/60 Hz, 3-phase 5-wire delta, 20 A
CV-12SLX
208 VAC, 50/60 Hz, 3-phase 4-wire, 50 A
CV-12SLX
400 VAC, 50/60 Hz, 3-phase 5-wire delta, 30 A
Site Preparation and Installation Instructions
: Section 3 of this F&I Guide has
been read and understood.
Customer: _______________________________________
Date: __________________
Company: _______________________________________
System: ________________
