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Section 5: Maintenance

Model 6517B Electrometer User's Manual

5-6

6517B-900-01 Rev. B August 2022

Number

Description

Event

+513

Calibration data lost

+514

DC calibration data lost

+515

Calibration dates lost

+516

Calibration tables lost

+517

Voltage offset lost

+518

Current offset lost

+519

Installed option id lost

+520

Option card not supported

+521

Cal Card Data Error

+522

GPIB communication language lost

+610

Questionable calibration

+611

Questionable temperature

+612

Questionable humidity

+613

Questionable voltage

+614

Questionable current

+615

Questionable ohms

+616

Questionable charge

+617

Questionable test sequence

+618

Resistivity: Current out of limit

+700

Low battery detected

+800

RS-232 framing error detected

+801

RS-232 parity error detected

+802

RS-232 overrun detected

+803

RS-232 break detected

+804

RS-232 noise detected

+805

Invalid system communication

+806

RS-232 settings lost

+807

RS-232 OFLO: Characters Lost

+808

ASCII only with RS-232

+809

Not allowed with RS-232

+850

Invalid test sequence setting

+851

Test sequence running

+860

Interlock violation error

+861

Voltage source limit too low for autoohms

+900

Internal system error

SE = Status event

EE = Error event

Summary of Contents for Keithley 6517B

Page 1: ...User s Manual 6517B 900 01 Rev B August 2022 P6517B 900 01B 6517B 900 01B tek com keithley Model 6517B Electrometer ...

Page 2: ...Electrometer User s Manual Model 6517B ...

Page 3: ...hout the prior written approval of Keithley Instruments LLC is strictly prohibited These are the original instructions in English All Keithley Instruments product names are trademarks or registered trademarks of Keithley Instruments LLC Other brand names are trademarks or registered trademarks of their respective holders Document number 6517B 900 01 Rev B August 2022 ...

Page 4: ...ed to mains These instruments will be marked as category II or higher Unless explicitly allowed in the specifications operating manual and instrument labels do not connect any instrument to mains Exercise extreme caution when a shock hazard is present Lethal voltage may be present on cable connector jacks or test fixtures The American National Standards Institute ANSI states that a shock hazard ex...

Page 5: ...plains hazards that could damage the instrument Such damage may invalidate the warranty The CAUTION heading with the symbol in the user documentation explains hazards that could result in moderate or minor injury or damage the instrument Always read the associated information very carefully before performing the indicated procedure Damage to the instrument may invalidate the warranty Instrumentati...

Page 6: ...ment on or off 2 6 Power up sequence 2 7 Using the menus 2 9 Menu 2 9 SAVESETUP 2 10 COMMUNICATION 2 11 CAL 2 11 TEST 2 11 LIMITS 2 12 STATUS MSG 2 12 GENERAL 2 12 Display 2 14 Exponent mode engineering or scientific 2 14 Messages 2 15 Display instrument information 2 15 Measurement function displays 2 16 Saving setups 2 20 Save a user setup 2 20 Restore a user setup 2 20 Reset the instrument 2 21...

Page 7: ...guration 4 4 Current measurements 4 5 Basic current measurement procedure 4 6 Current configuration 4 8 Resistance and resistivity measurements 4 9 Automatic voltage source 4 9 Resistance ranges 4 10 Resistance measurements 4 11 Resistivity measurements 4 14 Resistance configuration 4 21 Resistance display 4 22 Charge measurements 4 22 Basic charge measurement procedure 4 23 Charge configuration 4...

Page 8: ...6517B Electrometer User s Manual Table of contents Maintenance 5 1 Introduction 5 1 Line fuse 5 1 Line fuse replacement 5 2 Change the line voltage 5 3 Upgrading the firmware 5 3 Status and error messages 5 3 ...

Page 9: ...tion to help you get started using the 6517B It also provides information about the front and rear panels to familiarize you with the instrument Capabilities and features overview The 6517B has the following measurement capabilities DC voltage measurements from 1 μV to 200 V DC current measurements from 10 aA to 20 mA Charge measurements from 1 fC to 2 μC Resistance measurements from 1 Ω to 1018 Ω...

Page 10: ... of a repair Extended warranties are available on new and existing products Contact your local Keithley Instruments office sales partner or distributor for details Contact information If you have any questions after you review the information in this documentation please contact your local Keithley Instruments office sales partner or distributor You can also call the Tektronix corporate headquarte...

Page 11: ...atic bag and store it in the original packing carton Save the original packing carton for future shipment Returning instrument for service If you need to return the 6517B for repair or calibration call 1 800 408 8165 or complete the form at https www tek com en services repair rma request When you request service you need the serial number and firmware or software version of the instrument Shipmen...

Page 12: ...9 Display 2 14 Saving setups 2 20 Reset the instrument 2 21 Introduction This section provides power up information and descriptions of the controls and components of the 6517B Front panel overview The front panel of the 6517B is shown below The descriptions of the front panel controls follow Figure 1 6517B front panel Section 2 Getting started ...

Page 13: ...stored 2 OPTION Programs and operates an installed option card Also used to scan external scanner channels 3 HANDLE Pull out and rotate to change the handle position 4 VOLTAGE SOURCE OPERATE Indicator is on when the voltage source is on Off when in standby 5 RANGE and AUTO When used to select a range moves to a higher range When used while editing values it increments the selected digit When used ...

Page 14: ...ontext sensitive information about the present display LOCAL Cancels remote operation STORE Enables data storage RECALL Displays reading data reading number time Use the PREV and NEXT keys to display the maximum minimum average and standard deviation of information in the buffer CONFIG Configures functions and operations MENU Saves or restores instrument conditions sets up communications performs ...

Page 15: ...Disable GUARD for current resistance charge and unguarded voltage measurements Guarded configuration Enable GUARD for guarded voltage measurements Refer to Input configurations on page 3 1 for more information 2 PREAMP OUT Follows the signal amplitude applied to the INPUT terminal When GUARD is on PREAMP OUT is internally connected to the inner shell of the INPUT triaxial connector to configure th...

Page 16: ... connector for relative humidity measurements See Relative humidity on page 4 26 for more information 7 TEMP TYPE K Connect the Model 6517 TP type K thermocouple to this connector for temperature measurements See External temperature on page 4 27 for more information 8 Power line input module Provides connections for the power line input and contains the line fuse If the fuse needs to be replaced ...

Page 17: ...lace detachable mains supply cords with inadequately rated cords Failure to use properly rated cords may result in personal injury or death due to electric shock Before powering the instrument verify that line input voltage is set to the correct range for the power supply used to power the 6517B See Change the line voltage on page 5 3 if you need to change the line input voltage Operating the inst...

Page 18: ...EEE 488 address If the RS 232 interface is selected the message RS 232 MODE is displayed instead of the IEEE 488 address If the instrument is configured to display the calibration due date when it is turned on the calibration due date is displayed The format is mm dd yy where mmm is the month abbreviation dd is the day and yy is the year If no calibration date is set the display shows that it is d...

Page 19: ...not stored into EEPROM To store the values perform a comprehensive calibration Error 515 Calibration dates lost The calibration dates are set to factory default values but they are not stored into EEPROM To store the values perform a comprehensive calibration Set the power on defaults You can select the instrument defaults that go into effect when the instrument is powered on For more information ...

Page 20: ...umeric value move the cursor to the digit to be changed and use the RANGE or key to increment or decrement the digit Press the CONFIG key and then the or keys to display the CONFIGURE V SOURCE menu Press the ENTER key to save changes The EXIT key performs several functions Returns to previous menus Exits the menu Discards changes Any change that is not entered is canceled when EXIT is pressed Canc...

Page 21: ...e the present setup at a memory location 0 to 9 Saving setups on page 2 20 RESTORE Return the instrument to a setup that was previously stored in memory Saving setups on page 2 20 POWERON Select the instrument setup that goes into effect when the instrument is turned on The options are PRESET Return to the bench default conditions RST Return to the remote operation default conditions USER SETUP NU...

Page 22: ...ber timestamp internal temperature external temperature and status RS 232 serial interface CAL The CALIBRATION menu displays the calibration dates and allows you to set the option to display calibration dates on power up For more information on calibration refer to Calibration procedure in the Model 6517B Electrometer Reference Manual Menu item Description VIEW View calibration dates DISPLAY AT PO...

Page 23: ...able or disable the limit strobe signal of digital output 4 when a trigger occurs PASS PATTERN Specify patterns on digital outputs to signify limit pass STATUS MSG This selection enables or disables the status messages When enabled status messages are displayed to identify specific operations that are performed You can select ON Enable status messages OFF Disable the status messages When the statu...

Page 24: ...y and external temperature LIMIT CTRL Enables or disables the A D hardware limit AUTORANGE SPEED Select NORMAL or FAST autorange speed Line synchronization in in the Model 6517B Electrometer Reference Manual Relative humidity and external temperature readings on page 4 26 OUT OF LIMIT messages and Measurement range in in the Model 6517B Electrometer Reference Manual TIMESTAMP Configures the timest...

Page 25: ...are indicated by arrows on either side of the text Use the and keys to display the additional information Exponent mode engineering or scientific Readings on the display can be expressed in engineering units or in scientific notation Examples are shown in the table below When scientific notation is selected the exponent can be fixed to a specified value or it can be floating When the exponent is s...

Page 26: ...ay press the INFO ENTER EXIT or a function key During 6517B operation and programming the instrument may display front panel status and error messages To momentarily display the most recent status or error message press the MENU key and press the PREV display key The display is blank if no message is queued For more information on status and error message refer to Status and error messages on page...

Page 27: ...ading Bottom line shows a zero center bar graph with adjustable limits Calculations display if math is enabled Displays that are specific to a particular function or operation are discussed with that function or operation The displays that are common to all measurement functions are Time day and date Bar graph Zero centered bar graph Maximum and minimum values Actual value without relative offset ...

Page 28: ...to set the time hours minutes seconds To set the seconds to zero press the AUTO key If 12 HOUR is set for the FORMAT change the hour until AM or PM is displayed correctly 12 Press the ENTER key Bar graph The normal bar graph is a graphical representation of a reading as a portion of a range as shown in the following figure The vertical lines displayed along the bar designate 0 25 50 75 and 100 of ...

Page 29: ...ment represents 10 of the limit When a line at the limit changes to an arrow the reading exceeds the programmed range Figure 5 Zero centered bar graph display The plus and minus percentage of range that is programmed 0 01 to 99 99 applies to all functions Because of rounding values greater than 99 5 are shown as 100 and likewise values greater than 1 such as 1 67 are shown rounded to the nearest i...

Page 30: ...y selected function Exit the display by changing the function or entering a menu The resolution units and prefix on the bottom line are the same as those shown for top line reading Relative humidity and external temperature This display can provide relative humidity and external temperature readings if the appropriate sensors are connected to the instrument and enabled You can change the display o...

Page 31: ...ts when the instrument is powered on Refer to Set the power on defaults on page 2 8 Save a user setup To save a user set up 1 Press the MENU key to display the main menu 2 Select SAVESETUP Press the ENTER key The Setup Menu is displayed 3 Select SAVE Press the ENTER key 4 Use the RANGE keys to select the memory location 0 to 9 5 Press the ENTER key to save the setup Restore a user setup Use the RE...

Page 32: ...After resetting the instrument the instrument returns to the normal display of readings If you selected GPIB the instrument is returned to the Idle state The basic measurement procedures in this manual assume the BENCH defaults To reset the instrument to a set of defaults 1 Press the MENU key to display the main menu 2 Select SAVESETUP Press the ENTER key The Setup Menu is displayed 3 Select RESET...

Page 33: ...Formfeed Off Off Page Size 60 Lines 60 Lines Elements see note see note RS 232 Control send receive or talk only No effect No effect Talk Only printer setup Interval 1 1 Formfeed Off Off Page Size 60 Lines 60 Lines Baud Rate No effect No effect Terminator No effect No effect Flow Control No effect No effect Elements No effect No effect Digital Output States No effect No effect Logic Sense No effec...

Page 34: ...rcent Target Value Polynomial Constants a0 a1 a2 Deviation Reference Deviation Reference Ratio Reference Off Polynomial 1 0 0 0 1 0 0 0 1 0 1 0 1 0 On Polynomial 1 0 0 0 1 0 0 0 1 0 1 0 1 0 Q Coulombs Auto Discharge Range Autorange Limits Off Manual 2 µC Off High Off Manual 2 µC On High R Ohms Amps Rel Damping Measurement Type Resistivity Type Fixture Ks Kv Thickness Off Off Resistance Surface Use...

Page 35: ... s Yes 10 Triglink 10 No 2 5 s Yes Internal All 10 Yes Voltage 0 0 s No 2 5 s Yes 10 Triglink 10 No 2 5 s Yes Speed Normal 1 PLC Normal 1 PLC Status Messages Off Off Timestamp No effect No effect Test sequence Diode Start Voltage Stop Voltage Step Voltage Delay Capacitor Bias Voltage Points Interval Cable Bias Voltage Points Interval Resistor Source V1 Delay 1 Source V2 Delay 2 Surface Resistivity...

Page 36: ...asure Voltage Measure Time Square Wave Sweep High Level High Time Low Level Low Time Cycle Count Staircase Sweep Start Stop Step Step Time Start source Triglink Line 50 V 1 s 100 V 1 s 1 V 1 s 1 V 1 s 10 1 V 10 V 1 V 1 s Manual Line 1 50 V 1 s 100 V 1 s 1 V 1 s 1 V 1 s 10 1 V 10 V 1 V 1 s Manual Line 1 Triggers Advanced Measure layer Source Triglink Mode Triglink Input Triglink Output Delay Count ...

Page 37: ...igger source Timer Interval Immediate Line 2 Line 1 1 Acceptor Continuous Immediate 0 1 s Immediate Line 2 Line 1 1 Acceptor Continuous Immediate 0 1 s V Volts External Feedback Guard Range Autorange Off Off Manual 200 V Off Off Off Manual 200 V On V source Range Voltage Limit Value Resistive Current Limit Meter Connect 100 V Off 1000 V Off Off 100 V Off 1000 V Off Off Zero Check On On The default...

Page 38: ...ower off the equipment from the front panel or disconnect the main power cord from the rear of the 6517B before handling cables connected to the outputs Putting the equipment in standby mode does not guarantee that the outputs are not powered if a hardware or software fault occurs Electrometer input connector The rear panel triaxial INPUT connector is a 3 lug female triaxial connector that mates t...

Page 39: ...e inner shell of the triaxial connector as shown in the following figure Input low is accessed through the COMMON connector on the rear panel Use this configuration for guarded voltage measurements only Refer to Guard shield on page 3 8 for more information Figure 9 Input connector configuration guarded voltage only Maximum input levels The maximum input levels of the 6517B are summarized in the f...

Page 40: ...ws and the high voltage is seen across the input of the 6517B Figure 11 Capacitor test circuit without protection Adding a resistor and two diodes 1N3595 as shown in the following figure provides considerable extra protection The resistor must be large enough to limit the current through the diodes to 10 mA or less It must also be large enough to withstand the supply voltage The protection circuit...

Page 41: ...e is calculated R V I and displayed The resistance to be measured is connected to the center conductor of the INPUT triaxial connector and the V SOURCE OUT HI binding post as shown in the following figure Figure 13 Source voltage measure current basic connections The equivalent circuit for this configuration is shown in the following figure Figure 14 Source voltage measure current equivalent circu...

Page 42: ...R key The maximum common mode input voltage the voltage between input low and chassis ground is 500 VPEAK To prevent electrical shock that could cause injury or death do not exceed this value Voltage source output connections The voltage source output is accessed at the V SOURCE OUT LO and HI binding posts on the rear panel as shown in the following figure Figure 15 Volage source output basic conn...

Page 43: ...owed to move around The use of low noise cables helps minimize these triboelectric currents Refer to the 6517B datasheet available at tek com keithley for recommended cables For voltage measurements always use the shortest possible triaxial input cable and use guarding The increased input capacitance caused by a long input cable can significantly slow down the reading response For current and resi...

Page 44: ...eld for Unguarded voltage measurements Unguarded current measurements below 1 µA Low level charge measurements Typically the noise shield is connected to 6517B input LO However sometimes better noise performance can be achieved by connecting the noise shield to both 6517B LO and chassis ground The 6517B LO can be connected to chassis ground at the rear panel of the 6517B by installing the ground l...

Page 45: ...akage current in a high impedance test circuit Leakage resistance exists in the input cable between conductor paths and in the test fixture at connectors and insulators The concept of guarding is to surround the input high node or DUT with a guard shield that is at the same potential Current cannot flow through a leakage resistance that has a 0 V drop across it A typical connection for the guard s...

Page 46: ...rometer Reference Manual To enable guard for voltage measurements 1 Press the CONFIG key 2 Press the V key 3 Select the GUARD menu Press the ENTER key 4 Select ON Press the ENTER key Safety shield A safety shield is required whenever a hazardous voltage is present on the noise shield or guard shield or when a test circuit is floated above earth ground at a hazardous voltage level A shock hazard ex...

Page 47: ...ound Floating circuits Many measurements are performed above earth ground and in some test situations can result in safety concerns The following figures show examples where the 6517B floats at a hazardous voltage level In the following figure a shock hazard 100 V exists between meter input LO and chassis ground If meter input LO is connected to a noise shield the shock hazard is also present on t...

Page 48: ... A shock hazard exists at a voltage level equal to or greater than 30 VRMS To avoid possible shock hazards always surround exposed floating circuits and shields with a safety shield See Safety shield on page 3 9 for more information The maximum common mode voltage between electrometer LO and chassis ground is 500 V The maximum voltage between V source LO and earth chassis ground is 750 V Exceeding...

Page 49: ...ndby when the test fixture lid is open Screw terminal on the test fixture chassis for connection to safety earth ground You can also build a custom test fixture The following topics provide guidelines when building a test fixture Interlock When a normally open SPST momentary switch is properly implemented as a safety interlock the voltage source goes into standby whenever the test fixture lid is o...

Page 50: ...B to the interlock of another instrument The interlock is designed to be connected to a single pole interlock switch of a test fixture If you are connecting two or more 6517Bs to a single test fixture an isolated interlock switch for each instrument is required Connecting multiple instrument interlocks to the same switch could cause the safety interlock system to fail which could result in electri...

Page 51: ... result in electric shock The interlock connector on the 6517B is rated at 50 Hz to 60 Hz 140 VA maximum The CS 1305 connector of the interlock includes four pins left to right as viewed from rear of the 6517B Pin 1 Interlock safe Pin 2 Ground Pin 3 5 V dc output Pin 4 Surface volume select low volume high surface Custom built test fixtures The following topics describe custom built test fixtures ...

Page 52: ...d for safety grounding The other end of the ground wire must be attached to a known safety earth ground Failure to attach the ground wire to a known protective earth may result in electric shock that could result in injury or death A metal guard plate provides guarding or noise shielding for the DUT or test circuit It also serves as a mounting panel for the DUT or test circuits The guard plate mus...

Page 53: ...itch When the lid is open the switch is also open 2 Guard plate 3 Insulated terminal 4 Screw terminal for safety earth ground Use 18 AWG wire or larger for connections from the test fixture to safety earth ground 5 Three lug female triaxial to 6517B input 6 To 6517B voltage source OUT HI banana jack 7 Interlock connector to 6517B interlock Safety earth ground Multipurpose test fixture The followin...

Page 54: ...round 5 Device under test DUT or test circuit 6 To 6517B COMMON banana jack 7 Three lug female triaxial connector to 6517B input 8 To 6517B voltage source OUT dual banana jacks 9 Interlock connector to 6517B interlock Safety earth ground The multipurpose test fixture assumes that ammeter input LO is connected to voltage source LO inside the 6517B To set the LO to LO connection 1 Press the CONFIG k...

Page 55: ...es to install them in the test fixture Do not touch any connector or terminal insulator If you are installing a test circuit that is on a printed circuit board handle the board by the edges Do not touch any board traces or components Cleaning tips Use dry nitrogen gas to clean dust from connector and terminal insulators DUT and other test circuit components For newly build fixtures remove any sold...

Page 56: ... enabled Refer to Zero check in the Model 6517B Electrometer Reference Manual for more information Voltage measurements The 6517B can make unguarded or guarded voltage measurements from 1 μV to 210 V There are issues to be considered for making accurate voltage measurements Refer to Voltage measurement considerations in the Model 6517B Electrometer Reference Manual for more information For compreh...

Page 57: ...hout a properly installed and configured safety shield Refer to Shielding and guarding on page 3 6 for detail Do not apply more than 250 VPEAK dc to 60 Hz to the input Applying voltages above 250 VPEAK can damage the 6517B To make a voltage measurement 1 Press the Z CHK key until zero check is enabled ZeroCheck displayed 2 Press the V key to select the voltage function 3 Press the CONFIG key 4 Pre...

Page 58: ...s Manual Section 4 Basic measurements 6517B 900 01 Rev B August 2022 4 3 Figure 27 Unguarded voltage measurement connections Figure 28 Unguarded voltage measurements equivalent circuit Figure 29 Guard voltage measurement connections ...

Page 59: ...tage configuration menu press CONFIG and then V You can configure a function if it is not the active function When the function is selected the saved settings are used The voltage source value is not set in the configuration menu Use the VOLTAGE SOURCE and keys to adjust the voltage source value Place cursor on the digit and use the or key to change the value To change the polarity move the cursor...

Page 60: ... the averaging and median filters AVERAGING Configure digital averaging filter TYPE Select type of average filter NONE No average filtering performed AVERAGING Program a simple average filter 1 to 100 readings ADVANCED Program a simple average filter 1 to 100 readings with noise tolerance window 0 to 100 of range AVERAGING MODE Select moving average or repeating average mode MEDIAN Configure the m...

Page 61: ...the input bias current is within specifications A safety shield must be used whenever hazardous voltages 30 VRMS 42 VPEAK will be present in the test circuit To prevent electrical shock that could cause injury or death never use the 6517B in a test circuit that may contain hazardous voltages without a properly installed and configured safety shield Refer to Safety shield on page 3 9 for more infor...

Page 62: ...ements typical connections Figure 32 Current measurements equivalent circuit If you are measuring current in a floating circuit where significant leakage may exist between the ammeter input and circuit low connect the 6517B to the circuit as shown in the following figure Notice that ammeter input LO is connected to circuit high ...

Page 63: ... configuration menu Menu item Description SPEED Measurement speed integration time menu NORMAL 1 PLC power line cycle 16 67 ms for 60 Hz 20 ms for 50 Hz and 400 Hz FAST 0 01 PLC MEDIUM 0 1 PLC HIACCURACY 10 PLC SET SPEED EXACTLY Set integration in PLC 0 01 to 10 SET BY RSLN Optimizes the integration time for the selected resolution Refer to Integration time in the Model 6517B Electrometer Referenc...

Page 64: ...Reference Manual for more detail Resistance and resistivity measurements The 6517B can make resistance measurements and resistivity measurements surface and volume High resistance measurements above 1 MΩ may exhibit problematic background currents and can be improved using the alternating polarity test sequence Automatic voltage source The 6517B has an automatic voltage source mode for resistance ...

Page 65: ... use the high voltage To set the voltage source 1 Press the CONFIG key 2 Press the R key 3 Select VSOURCE Press the ENTER key 4 Select AUTO or MANUAL Press the ENTER key Resistance ranges The reading ranges for the resistance function are listed in the following table To optimize range selection Use autorange Select the next lower range when UNDERFLOW is displayed With the manual voltage source se...

Page 66: ...urrent on page 4 13 Accurate high resistance measurements require the use of a low leakage test fixture Hazardous voltages may be present on the output and guard terminals To prevent electrical shock that could cause injury or death NEVER make or break connections to the 6517B while the output is on Power off the equipment from the front panel or disconnect the main power cord from the rear of the...

Page 67: ...ress the EXIT key to return to the measurement display 11 Connect the resistance to be measured to the 6517B as shown in the following figure Figure 34 Typical connections for resistance measurements Voltage source low is internally connected to 6517B low Figure 35 Typical connections for resistance measurements equivalent circuit ...

Page 68: ...e AUTO key to select autorange 15 Press the OPER key to source voltage to the DUT 16 Press the Z CHK key to disable zero check and start measurements 17 When measurements are complete press the OPER key again to place the voltage source in standby If the flashing VOLTAGE SOURCE OPERATE LED flashes it indicates that the voltage source has gone into current limit and the programmed voltage is not be...

Page 69: ...n to the measurement display 15 Re install the device under test DUT in the test fixture 16 Press the R key and proceed to the step in Resistance measurements on page 4 11 that disables zero check Resistivity measurements The 6517B can make surface resistivity measurements from 103 to 1017 ohms and volume resistivity measurements from 103 to 1018 ohms cm Typical resistivity test fixtures such as t...

Page 70: ...lator sample Surface resistivity is measured by applying a voltage potential across the surface of the insulator sample and measuring the resultant current as shown in the following figure Figure 36 Surface resistivity measurement technique The 6517B automatically performs the following calculation and displays the surface resistivity reading ρS KSR Where ρS is the surface resistivity per square R...

Page 71: ...e dimensions Test fixture dimensions Model 8009 D1 2 000 in D0 2 125 in D2 2 250 in g 0 125 in Volume resistivity Volume resistivity is defined as the electrical resistance through a cube of insulating material When expressed in ohm centimeters it is the electrical resistance through a one centimeter cube of insulating material When expressed in ohm inches it is the electrical resistance through a...

Page 72: ...trode B Effective area coefficient g Distance between the guarded electrode and the ring electrode Volume resistivity is measured by applying a voltage potential across opposite sides of the insulator sample and measuring the resultant current through the sample as shown in the following figure Figure 38 Volume resistivity measurement technique Refer to the Circular electrode dimensions figure in ...

Page 73: ...pts to change the measurement type from the 6517B menu are ignored If the interlock cable is not connected the settings for volume or surface do not work properly and you cannot change the measurement type from the menu Hazardous voltages may be present on the output and guard terminals To prevent electrical shock that could cause injury or death NEVER make or break connections to the 6517B while ...

Page 74: ...the ENTER key 9 Select FIXTURE MODEL Press the ENTER key 10 Select MODEL 8009 Press the ENTER key 11 Press the EXIT key twice to return to the CONFIGURE OHMS menu 12 Select VSOURCE Press the ENTER key 13 Select AUTO or MANUAL AUTO The instrument automatically selects the optimum voltage source value 40 V or 400 V for the measurement range MANUAL You select the voltage source range and value 14 Pre...

Page 75: ...select the resistance measurement range or press the AUTO key to select autorange When autorange is selected the instrument does not go the 2 TΩ 20 TΩ and 200 TΩ ranges 18 Press the Z CHK key to disable zero check 19 Press the OPER key to place the voltage source in operate 20 Wait an appropriate electrification period bias time Typically a bias time of 60 seconds is used 21 Observe the resistivit...

Page 76: ...filter TYPE Select type of average filter NONE No average filtering performed AVERAGING Program a simple average filter 1 to 100 readings ADVANCED Program a simple average filter 1 to 100 readings with noise tolerance window 0 to 100 of range AVERAGING MODE Select moving average or repeating average mode MEDIAN Configure the median filter DISABLE Disable the median filter ENABLE Enable median filt...

Page 77: ...r the Model 8009 test fixture if using an effective area coefficient less than one B 1 After selecting this option you are prompted to enter the value for Ks or Kv Refer to Resistivity measurements on page 4 14 for more information VSOURCE Select AUTO or MANUAL voltage source Refer to Automatic voltage source on page 4 9 for more information Resistance display When a resistance function is selecte...

Page 78: ...ge reading reaches the specified level After the integrator resets the charge measurement process restarts at zero To make charge measurements 1 Press the Z CHK key to enable zero check ZeroCheck displayed 2 Select the Q key to select the charge function 3 Press the CONFIG key 4 Press the Q key 5 Select AUTO DISCHARGE Press the ENTER key 6 Select OFF Disable autodischarge You can use zero check to...

Page 79: ...harge measurements equivalent circuit Charge configuration The following information explains the various configuration options for the charge function The configuration menu is summarized in the following table This menu is accessed by pressing the CONFIG key and then the Q key You do not have to select a function to configure it When the function is selected it assumes the programmed status ...

Page 80: ...ISABLE Disable the median filter ENABLE Enable median filter and specify rank 1 to 5 Refer to Filters in the Model 6517B Electrometer Reference Manual for detail RESOLUTION AUTO 3 5 4 5 5 5 6 5 Resolution menu Default to resolution appropriate for the integration time Select a specific resolution Refer to Display resolution in the Model 6517B Electrometer Reference Manual for detail AUTO DISCHARGE...

Page 81: ...faces GPIB and RS 232 and the buffer Relative humidity The Keithley Instruments Model 6517 RH humidity probe measures relative humidity This sensor plugs into the HUMIDITY connector on the rear panel of the 6517B You can measure relative humidity from 0 to 100 using the Model 6517 RH To make relative humidity measurements 1 Connect the 6517 RH humidity probe to the HUMIDITY connector on the rear p...

Page 82: ...ress the ENTER key 4 Select A D CONTROLS Press the ENTER key 5 Select DATA STAMP Press the ENTER key 6 Select TEMPERATURE 7 Use the RANGE keys to toggle temperature readings to ON Press the ENTER key 8 Press the EXIT key as needed to return to the measurement display To change the temperature units 1 On the front panel press the MENU key 2 Select the GENERAL menu Press the ENTER key 3 Select the D...

Page 83: ... the channels place the cursor on each channel and press a RANGE or key to select the status Press the ENTER key 6 Select SCAN MODE Press the ENTER key 7 Select the VOLTAGE scan mode This is the fastest scan mode and can be used when break before make switching is not required Press the ENTER key 8 Select VSRC LIMIT Press the ENTER key 9 Select YES to enable the 200 V voltage source limit or NO to...

Page 84: ...ngs to store in the buffer Press the ENTER key The message Press ENTER to begin is displayed 10 Press the ENTER key to start the scan The display shows the measurement and channel If data is stored the reading number is displayed When the scan is complete SCAN COMPLETE is displayed 11 If data was stored in the buffer select RECALL DATA to review the data Press the ENTER key Use the RANGE and keys ...

Page 85: ...Trigger connections for external scanning Connect the 6517B to the switch system as shown in the following figure Refer to Triggering in the Model 6517B Electrometer Reference Manual for more information on using Trigger Link Figure 44 Trigger Link connections between 7001 or 7002 and 6517B Configure external channels To set up the scan you specify the number of channels or external inputs for the...

Page 86: ...he 7001 or 7002 press the SCAN key 6 Select SELECT CONTROL NUMBER OF CHANS CHAN COUNT INFINITE Do not exit from the menu structure after selecting an infinite channel count 7 On the 6517B press the ENTER key to display the next message 8 Select the trigger source If you are using the Trigger Link select TRIGLINK If you are using conventional external triggering select EXTERNAL Press the ENTER key ...

Page 87: ...played If you select YES message indicating the total number of readings to be stored in the buffer is displayed Press the ENTER key to continue 17 Press the ENTER key to start the scan process The display shows the measurement and channel If data is stored the reading number is displayed When the scan is complete SCAN COMPLETE is displayed 18 If data was stored in the buffer select RECALL DATA to...

Page 88: ...e instrument before replacing a line fuse Failure to do so could expose the operator to hazardous voltages that could result in personal injury or death Use only the correct fuse type Failure to do so could result in injury death or instrument damage If the instrument repeatedly blows fuses locate and correct the cause of the problem before replacing the fuse If the fuse continues to become damage...

Page 89: ...Locate the fuse holder which is on the rear panel above the ac receptacle 5 Squeeze the tabs on the fuse holder shown in the following figure to release the fuse drawer Figure 45 Fuse tabs 6 Slide the fuse drawer out 7 Remove the damaged fuse from the drawer 8 Replace the fuse with the same type See Line fuse on page 5 2 on page 5 1 for replacement part numbers 9 Push the fuse drawer back into the...

Page 90: ...2 on page 5 1 for more information Upgrading the firmware For instruction on upgrading the firmware refer to the release notes for the firmware Firmware and release notes are available on tek com keithley Filter by Software to locate the firmware Status and error messages During 6517B operation and programming the instrument may display front panel status and error messages The messages are listed...

Page 91: ...rigger ignored EE 210 Trigger error EE 203 Command protected EE 202 Settings lost due to rtl EE 201 Invalid while in local EE 200 Execution error EE 178 Expression data not allowed EE 171 Invalid expression EE 170 Expression error EE 168 Block data not allowed EE 161 Invalid block data EE 160 Block data error EE 158 String data not allowed EE 154 String too long EE 151 Invalid string data EE 150 S...

Page 92: ...r SE 172 Waiting in arm layer 1 SE 173 Waiting in arm layer 2 SE 174 Re entering the idle layer SE 301 Reading overflow SE 302 Low limit 1 event SE 303 High limit 1 event SE 304 Low limit 2 event SE 305 High limit 2 event SE 306 Reading available SE 307 Voltmeter Complete SE 308 Buffer Available SE 309 Buffer half full SE 310 Buffer full SE 311 Buffer Overflow SE 312 Buffer Pretriggered SE 313 Rea...

Page 93: ...ionable voltage SE 614 Questionable current SE 615 Questionable ohms SE 616 Questionable charge SE 617 Questionable test sequence SE 618 Resistivity Current out of limit EE 700 Low battery detected EE 800 RS 232 framing error detected EE 801 RS 232 parity error detected EE 802 RS 232 overrun detected EE 803 RS 232 break detected EE 804 RS 232 noise detected EE 805 Invalid system communication EE 8...

Page 94: ...eithley trademarks and trade names are the property of Keithley Instruments All other trademarks and trade names are the property of their respective companies Keithley Instruments 28775 Aurora Road Cleveland Ohio 44139 1 800 833 9200 tek com keithley 04 2022 ...

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