PRODUCT DESCRIPTION
delta10 - Rev00 - dl/18-01-2005
2
4
2.3 Media Required for Opera-
tion
According to the version following media are re-
quired for the operation:
•
Compressed air (Option)
•
Nitrogen (Option)
•
Vacuum
•
DI-Water (Option)
•
Coating media (e.g. resist, option)
•
Chemicals (e.g. developer or cleaning media,
option)
•
Exhaust (option)
For detailed information and connection values see
chapter 3.
2.4 System Configuration
2.4.1 Main Components
•
AC-Servo motor
•
Programmable controller
•
Process time programmable between 1 and 999
seconds.
•
Programmable rotation speed between 100 and
6,000 rpm
±
50 U/min.
•
Programmable acceleration ramp, 10 steps
•
Up to 10 process steps
•
Vacuum indicator
•
Vacuum switchable.
2.4.2 Additional Components
•
Vacuum chuck
•
Low contact chuck
•
Adapter for media supply
•
N2 blow-off, manually switchable
2.5 Technical Data
2.5.1 Dimensions
Delta 10BM
Mounting dimensions
Spinning module
Lenght:. . . . . . . . . . . . . . . . . . . . . . . . . . . 305 mm
Width:. . . . . . . . . . . . . . . . . . . . . . . . . . . . 305 mm
Depth: . . . . . . . . . . . . . . . . . . . . . . . . . . . 285 mm
. . . . . . . . . . . . . . . . . . . . . . . . without waste bottle
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . (45° edges)
Controller
Width:. . . . . . . . . . . . . . . . . . . . . . . . . . . . 214 mm
Height: . . . . . . . . . . . . . . . . . . . . . . . . . . . 108 mm
Depth: . . . . . . . . . . . . . . . . . . . . . . . . . . . 320 mm
Overall dimentsions
Spinning module
Length:. . . . . . . . . . . . . . . . . . . . . . . . . . . 325 mm
Width.. . . . . . . . . . . . . . . . . . . . . . . . . . . . 325 mm
Depth: . . . . . . . . . . . . . . . . . . . . . . . . . . . 330 mm
Controller
Width:. . . . . . . . . . . . . . . . . . . . . . . . . . . 233,3 mm
Height: . . . . . . . . . . . . . . . . . . . . . . . . . . 142,5 mm
Depth: . . . . . . . . . . . . . . . . . . . . . . . . . . . 320 mm
Delta 10TT
Housing
Length:. . . . . . . . . . . . . . . . . . . . . . . . . . . 630 mm
Width.. . . . . . . . . . . . . . . . . . . . . . . . . . . . 340 mm
Height: . . . . . . . . . . . . . . . . . . . . . . . . . . . 346 mm
2.5.2 Weight
Model BM: . . . . . . . . . . . . . . . . . . . . approx. 15 kg
. . . . . . . . . . . . . . . . . . . . . . . . . without packaging
Model TT:. . . . . . . . . . . . . . . . . . . . . approx. 20 kg
. . . . . . . . . . . . . . . . . . . . . . . . . without packaging
2.5.3 Requirements
Electrical
Power supply: . . . . . . . . . . . . . . . . . 110/230 VAC
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50/60 Hz
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . mind. 6 Amp.
Power consumption: . . . . . . . . . . . . . . . . . 0,5 kW
. . . . . . . . . . . . Emergency OFF use safety socket
Summary of Contents for MicroTec Delta10TT
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Page 40: ...MECHANICAL DRAWINGS AND PARTS LIST delta10 Rev00 dl 18 01 2005 7 2 7 2 Vacuum coupling ...
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Page 43: ...2 dl 2005 01 TECHNICAL DOCUMENTATION Electrical Schematics ...
