PRODUCT DESCRIPTION
delta10 - Rev00 - dl/18-01-2005
2
1
2 PRODUCT DESCRIPTION
2.1 Intended Use
Delta10BM/T spinning system is applied exclusive-
ly to coat, dry, clean and develop wafers and sub-
strates using spinning techniques, according to the
specifications agreed upon mutually.
Delta 10BM/T is applied exclusively to process sub-
strate with sizes up to:
max.
. . . . . . . . . . . . . . . . . . . . . . . . . . . ∅
150 mm (6“)
max . . . . . . . . . . . . . . . . . . 4“ x 4“(100 x 100 mm)
The substrate is put on specially constructed
chucks.
Possible applications:
•
test or small series productions in laboratories
and research institutions.
•
large series productions in industrial clean room.
Danger!
The system is not suited or designed for
any other applications than the ones
stated above.
Any modification of the system requests
manufacturer’s prior consent as well as
his confirmation in writing.
Danger!
Without proper protection the system is
not suited for the application of explosive
or hazardous chemicals.
Our products are continuously modified and im-
proved due to innovation, legal requirements and
standards. As a consequence, the information giv-
en in this documentation may not accurately reflect
every detail of the system actually delivered. Please
contact the manufacturer in cases of uncertainty.
Summary of Contents for MicroTec Delta10TT
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