SUSS MicroTec Delta10TT, Operator Manual And Technical Documentation

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SAFETY INSTRUCTIONS
delta10 - dl/01-2005
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1.3.3.2 Electrical Drawer/CI Box
Danger - High Voltage!
Electrical equipment is behind the covers.
Access only for qualified and authorized
persons and if the system is switched off.
1.3.4 Chemicals Hazards
Chemicals are provided and applied by the user.
Proper handling of chemicals is the user’s responsi-
bility.
Danger!
Explosive chemicals!
When using explosive media or explosive
combinations of media, the system should
have functioning gas sensor and control
unit. Also an exhaust controlling unit.
The gas sensor detects gas concentration
inside the system, especially near elec-
trical installations and motors.
Danger!
It is the user’s responsibility to mark all
containers and supply lines of chemicals
(i.e. containers of media and waste) with
appropriate labels and warning signs.
Danger!
When handling chemicals, observe rele-
vant safety regulations as well as sup-
plier’s information (safety data sheet and
additional advice).
Danger!
When handling chemicals, ensure proper
ventilation and exhaustion of vapors.
Danger!
When handling chemicals, please ob-
serve that released chemicals may react
with each another, leading to unwanted
and unknown substances. These sub-
stances may bear major additional risks.
Danger!
Solvents
Inflammable, explosive, toxic
- Do not inhale its vapors
(danger of suffocation).
- Prevent electrostatic loading.
- Keep away from ignition sources.
- Do not smoke near the system.
- Do not eat near the system (danger of
poisoning).
- Do not touch.
Danger!
Process chemicals
Inflammable, explosive, toxic
- Do not inhale its vapors (danger of
suffocation).
- Prevent electrostatic loading.
- Beware of ignition sources.
- No not smoke near the system.
- Do not eat near the system (danger of
poisoning).
- Do not touch.
Danger!
Corrosives, Inflammable, explosive, toxic
- Do not inhale its vapors
(danger of suffocation).
- Prevent electrostatic charging.
- Beware of ignition sources.
- Do not smoke.
- Do not eat (danger of poisoning).
- Avoid contact to eyes.
- Do not touch.
Danger! Gases
Inflammable, explosive, toxic
- Do not inhale (danger of suffocation).
- Prevent electrostatic charging.
- Beware of ignition sources.
- Do not smoke.
Danger!
In case corrosive, gassing or noxious wet
media are applied you have to prevent
any peril to your staff by all means.
Danger!
Explosive chemicals
Processing substrates containing BCB or
polyimides may require organic solvents
for negative development. Those solvents
or combinations of them can be haz-
ardous or explosive.
Danger!
Explosive chemicals
When using explosive media or explosive
combinations of media, the system may
never be operated without permanent ni-
trogen blow-off.
Nitrogen blow-off reduces the concentra-
tion of media inside the process chamber.
Permanent exhaust has to be ensured.