Table of Contents
4.2.3
Ending evaporation...............................................................................12
4.3
Evaporation from crucibles......................................................12
4.3.1
Crucible lids............................................................................................12
4.4
Operation with the Flux Controller.........................................13
4.4.1
Setting up Manual Control of the PID Controller................................14
4.4.2
Setting the Maximum and Minimum Output......................................15
4.4.3
Setting up Auto Control........................................................................16
4.4.4
PID and Controller Parameters..............................................................17
4.4.5
Safe operation tips................................................................................17
5
Maintenance
19
5.1
Replacing the filament.............................................................19
5.2
Making a new filament............................................................20
6
Specifications and Options
21
6.1
Physical......................................................................................21
6.2
Beam..........................................................................................21
6.3
Power Supply............................................................................22
6.4
Options......................................................................................22
7
Drawings
23
Summary of Contents for EBE-1
Page 1: ...EBE 1 Electron Beam Evaporator 1 11...
Page 8: ...Inspection 4 EBE 1...
Page 22: ...Operation 18 EBE 1...
Page 28: ...Drawings 24 EBE 1 Figure 4 Evaporator details...
Page 30: ...List of Figures II EBE 1...
Page 32: ...List of Tables IV EBE 1...