All rights reserved. No part of this manual may be reproduced
without the prior permission of SPECS GmbH.
User manual for the Electron Beam Evaporator
18 March 2008
.
SPECS order number for this manual:
78 000 155
SPECS GmbH - Surface Analysis
and Computer Technology
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13355 Berlin
GERMANY
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Summary of Contents for EBE-1
Page 1: ...EBE 1 Electron Beam Evaporator 1 11...
Page 8: ...Inspection 4 EBE 1...
Page 22: ...Operation 18 EBE 1...
Page 28: ...Drawings 24 EBE 1 Figure 4 Evaporator details...
Page 30: ...List of Figures II EBE 1...
Page 32: ...List of Tables IV EBE 1...