Chapter
I
Index
A
alignment..................................7
C
chamber pressure......................9
D
deflection................................14
E
electron bombardment............1
emission.....................................1
emission current.........7p., 10pp.
emission current limit.............17
examples....................................1
F
feedthrough..........................3, 5
filament.................3, 5, 7p., 19p.
filament current...............7p., 10
filaments....................................3
flux...........................................14
flux controller..................5, 13p.
flux electrode............................3
G
gases........................................14
ground.......................................3
I
IEC plug.....................................5
L
limit............................................7
M
Mains.........................................5
MHV feedthrough...........3, 5, 13
monitoring..............................11
P
PID controller.....................15pp.
power supply.......................5, 10
pressure.....................................9
R
range.........................................8
S
Safety ........................................2
Set point..................................15
Setting up..................................8
shutter.......................................9
T
temperatures.............................1
V
Summary of Contents for EBE-1
Page 1: ...EBE 1 Electron Beam Evaporator 1 11...
Page 8: ...Inspection 4 EBE 1...
Page 22: ...Operation 18 EBE 1...
Page 28: ...Drawings 24 EBE 1 Figure 4 Evaporator details...
Page 30: ...List of Figures II EBE 1...
Page 32: ...List of Tables IV EBE 1...