SMC Networks 1F3 0 Series Manual Download Page 2

Design and Selection

Mounting

Thread

1/8

1/4

3/8

1/2

3/4

1

Proper tightening torque (N·m)

7 to 9

12 to 14
22 to 24

28 to 30
28 to 30
36 to 38

Flow Switches

Precautions 1

Be sure to read before handling.

1. Make sure to use a switch by the specified voltage.

Use of a switch outside the range of the specified voltage can 
cause not only malfunction and damage of the switch, but 
also electrocution and fire.

2. Never use such a load, which exceeds the 

maximum allowable load.

It may result in a damage to a switch.

3. Since the type of fluid varies depending on the 

product, make sure to verify the specifications.

Never use flammable gases or fluids, since the switch is not 
explosion proof construction. It may result in a fire.

[For air]

4. Make sure to use a switch within the specified flow 

rate for measurement and the maximum operating 
pressure.

Operating beyond the specified flow rate and operating pressure 
can damage the switch.

If using a switch by exceeding the maximum operating pressure, 
switch is damaged.

[For water]

5. Make sure to use a switch within the specified flow 

rate for measurement and the maximum operating 
pressure.

Operating beyond the specified flow rate and operating 
pressure can damage the switch.

Damage to the switch may occur if the switch is subject to 
higher pressure than its designed limit.

Avoid especially the application of pressure above 
specifications through a water hammer.

<Countermeasure examples>

a) Use a device such as a water hammer relief valve to slow 

the valve's closing speed.

b) Absorb an impact pressure by using a rubber material 

piping such as a rubber hose and an accumulator.

c) Keep the piping length as short as possible.

1. Mount a switch by observing the proper tightening 

torque.

When a switch is tightened beyond the specified tightening 
torque, a switch may be damaged. On the other hand, 
tightening below the specified tightening torque may cause 
the installation screws to come loose during operation.

2. Apply a wrench only to the metal part of the piping 

when installing the flow switch in the system 
piping. 

Do not apply a wrench to the plastic part of the main housing 
of the switch.

3. Monitor the flow direction of the fluid.

Install a switch in the direction as indicated on the body.

4. Remove solid foreign objects, etc. inside piping by 

air blow before connecting a switch with piping.

5. Do not drop or bump.

Do not drop, bump, or apply excessive impacts (490 m/s

2

while handling. Although the external body of the switch 
(switch case) may not be damaged, the inside of the switch 
could be damaged and cause a malfunction.

6. Hold the body of a switch when handling.

The tensile strength of the cord is 49 N. Applying a greater 
pulling force on it can cause a malfunction. When handling, 
hold the body of the switch—do not dangle it from the cord.

7. Do not use until you can verify that equipment can 

operate properly.

Verify whether it is mounted correctly by running fluids or 
applying the electricity in order to conduct suitable function 
and leakage tests when mounting for the first time or after 
system repair or modification was made. 

[For air] 

8. Ever mount a switch in a place that will be used as 

a scaffold during piping.

If an excessive weight is applied on a switch, switch may be 
damaged. 

9. Be sure to allow straight pipe length that is 

minimum 8 times the port size upstream and 
downstream of the switch piping.

Do not suddenly narrow the pipe size because doing so will 
disturb the flow speed distribution in the pipe, making it 
impossible to obtain the correct measurements.

[For water]

10. Never install a switch in such a place, where switch 

is used as a foothold in the piping.

Damage may occur if an excessive load is applied to the 
switch. Especially when the switch supports the piping, do not 
apply a load of 15 N·m or more to the metal parts of the 
switch. 

Warning

Warning

16-11-2

Summary of Contents for 1F3 0 Series

Page 1: ...e Rc NPT G 1F3 0 1F3 1 1F3 3 Flow rate measuring range l min 14 to 60 20 to 150 36 to 2600 1ab 3 4 1 1 Page 16 12 1 Page 16 12 6 Digital Flow Switch Mechanical Flow Switch Digital Flow Switch for Air Series PF2A Refer to page 16 11 7 Digital Flow Switch for Water Series PF2W Refer to page 16 11 17 Digital Flow Switch for Deionized Water and Chemicals Series PF2D Refer to page 16 11 37 16 11 1 ZSE ...

Page 2: ...n the other hand tightening below the specified tightening torque may cause the installation screws to come loose during operation 2 Apply a wrench only to the metal part of the piping when installing the flow switch in the system piping Do not apply a wrench to the plastic part of the main housing of the switch 3 Monitor the flow direction of the fluid Install a switch in the direction as indicat...

Page 3: ... in an environment where temperature changes drastically even within the allowable ambient temperature range 1 Perform periodical inspections to ensure proper operation of the switch Unexpected malfunctions and wrong operations may not secure the safety 2 Use caution when using a switch for an interlock circuit When a pressure switch is used for an interlock circuit devise a multiple interlock sys...

Page 4: ...0 to 12000 0 5 to 4 2 to 16 5 to 40 10 to 100 0 5 to 4 2 to 16 5 to 40 Flow control of cooling water for wafer temperature regulation and high frequency electric power supply Application examples Flow control of N2 gas to prevent detection camera shimmering and lead frame oxidation Flow control of pressurized cooling water for welding gun MULTI COUNTER CEU5 A COM COM COM B DC12V GND F G R S HOLD B...

Page 5: ...l min 6000 l min 3000 l min PF2A510 550 511 521 551 PF2A30 31 Integrated display type Remote type Display unit Sensor unit Output specifications Port size Rc NPT G 1 8 1 4 3 8 1 2 11 2 1 2 Switch output Analog output Accumulated pulse output 0 5 to 4 2 to 16 5 to 40 10 to 100 Flow rate measurement range l min PF2W30 33 PF2W704 720 740 711 PF2W504 520 540 511 Integrated display type Remote type Dis...

Page 6: ...ion in X Y Z directions for 2 hrs each 490 m s2 in X Y Z directions 3 times each 1000 Vp p Pulse width 1 µs Rise time 1 ns 1 2 3 4 3 8 1 2 3 8 660 g Display units are the same as those of remote type digital flow switch for water series PF2W3 Refer to page 16 13 19 for details Note 1 The system accuracy when combined with PF2W3 Note 2 Output system can be selected during initial setting Note 3 Wit...

Page 7: ...ssure loss MPa 4 0 3 5 3 0 2 5 2 0 1 5 1 0 0 5 Flow rate l min Pressure loss MPa Flow rate l min 10 12 14 16 2 0 4 6 8 0 02 0 03 0 04 0 05 0 01 Pressure loss MPa Flow rate l min 0 01 0 07 0 06 0 05 0 04 0 03 0 02 40 35 30 25 20 15 10 5 0 Material Stainless steel FKM PPS PPS Flow direction Connectors and operating unit descriptions are the same as Series PF2A for air Refer to page 16 11 10 16 11 28...

Page 8: ... 8 7 5 Main circuit Brown 1 DC Black 4 OUT White 2 NC Analog output Blue 3 DC Wiring PF2W5 T 2 Main Circuit 4 3 2 1 Connector pin numbers Use this sensor by connecting to SMC remote type display unit Series PF2W3 Pin no 1 2 3 4 Pin description DC NC Analog output DC OUT 0 5 2 5 4 16 40 PF2W504T 2 PF2W520T 2 PF2W540T 2 Part no Minimum measured flow rate value l min Maximum measured flow rate value ...

Page 9: ... for air only Check the load and wiring for OUT1 Check the load and wiring for OUT2 Perform the RESET operation and reset all data again Reduce the flow rate until it is within the flow rate measurement range using an adjustment valve Key lock This function prevents incorrect operations such as changing the set value accidentally Accumulation clearance This is to clear the accumulated value Initia...

Page 10: ...ircuit at the output side of the switch damage may still occur if a surge is applied repeatedly When a surge generating a load such as a relay or solenoid is directly driven use a type of switch with a built in surge absorbing element 4 Since the type of fluid varies depending on the product be sure to verify the specifications The switches do not have an explosion proof rating To prevent a possib...

Page 11: ...r 6 Use the switch within the specified fluid and ambient temperature range Fluid and ambient temperatures are 0 to 50 C Take measures to prevent freezing fluid when below 5 C since this may cause damage to the switch and lead to a malfunction The installation of an air dryer is recommended for eliminating condensate and moisture Never use the switch in an environment where there are drastic tempe...

Page 12: ... unit Switch measures at mass flow rates without being influenced by temperature and pressure The switches use l min as the flow rate indicator unit in which the volumetric flow is substituted for mass flow at 0 C and 101 3 kPa The volumetric flow rate at 20 C 101 3 kPa and 65 RH ANR can be displayed with the high flow rate type switches for air Others Measured Fluid Warning Warning Detection prin...

Page 13: ...in 50 l min 500 l min 525 l min 25 l min 0 5 l min 2 l min 5 l min 10 l min 20 l min 40 l min 100 l min For Air PF2A For Water PF2W Caution Set Flow Rate Range and Rated Flow Rate Range Set the flow rate within the rated flow rate range The regulating flow rate range is the range of flow rate that can be set on the controller The rated flow rate range is the range of flow rate that satisfies the s...

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