SMC Networks 1F3 0 Series Manual Download Page 12

Series 

PF2A/PF2W

Specific Product Precautions 3

Be sure to read before handling.

1. Check regulators and flow adjustment valves 

before introducing the fluid.

If pressure or flow rate beyond the specified range are applied 
to the switch, the sensor unit may be damaged.

[For air]

2. 

The fluids that the switch can measure 

accurately are nitrogen and dry air. However, 
only dry air can be measured with the high 
flow rate type.

Please note that accuracy cannot be guaranteed when other 
fluids are used.

3. Never use flammable fluids.

The flow velocity sensor heats up to approximately 150

°

C.

4. 

Install a filter or mist separator on the 
upstream side when there is a possibility of 
condensate and foreign matter being mixed in 
with the fluid.

The rectifying device built into the switch will be clogged up 
and accurate measurement will no longer be possible.

[For water]

5. 

The fluid that the switch can measure 

accurately is water.

Please note that accuracy cannot be guaranteed when other 
fluids are used.

6. Never use flammable fluids.
7. Install a filter on the inlet side when there is a 

possibility of condensate and foreign matter 
being mixed in with the fluid.

If foreign matter adheres to the switch’s vortex generator or 
vortex  detector, accurate measurement will no longer be 
possible.

1. Since switch output remains OFF while a 

message is displayed after the power is turned 
on, start measurement after a value is 
displayed.

2. 

Perform settings after stopping control 
systems.

When the switch’s initial setting and flow rate setting are 
performed, output maintains the condition prior to the settings. 
With the 100, 200, and 500 

l

/min type switches for air, output 

turns OFF when the switch’s initial setting and flow rate setting 
are preformed.

3. Do not apply excessive rotational force to the 

display unit.

The integrated type display unit can rotate 360

°

.  Rotation is 

controlled by the stopper; however, the stopper may be 
damaged if the display unit is turned with excessive force.

[For air]

4. Be certain to turn on the power when the flow 

rate is at zero.

Allow an interval of 10 minutes after turning on the power, as 
there are some changes in the display.

5. Flow rate unit

Switch measures at mass flow rates without being influenced 
by  temperature and pressure. The switches use 

l

/min as the 

flow rate indicator unit, in which the volumetric flow is 
substituted for mass flow at 0

°

C and 101.3 kPa. The 

volumetric flow rate at 20

°

C,  101.3 kPa, and 65% RH (ANR) 

can be displayed with the high flow rate type switches for air.

Others

Measured Fluid

Warning

Warning

Detection principle of digital flow switch for air

A heated thermistor is installed in the passage, and fluid absorbs heat from 
the thermistor as it is introduced to the passage. The thermistor's resistance 
value increases as it loses heat. Since the resistance value increase ratio 
has a uniform relationship to the fluid velocity, the fluid velocity can be 
detected by measuring the resistance value. To further compensate the fluid 
and ambient temperature, the temperature sensor is also built into the switch 
to allow stable measurement within the operating temperature range.

Fluid velocity
detection element

Temperature
compensation element

Detection principle of digital flow switch for water

When an elongated object (vortex generator) is placed in the flow, 
reciprocal vortexes are generated on the downstream side. These vortexes 
are stable under certain conditions, and their frequency is proportional to 
the flow velocity, resulting the following formula.

f = k x v

f: Frequency of vortex  v: Flow velocity  k: Proportional constant
(determined by the vortex generator's dimensions and shape). 
Therefore, the flow rate can be measured by detecting this frequency.

Fluid

Vortex generator

Vortex detector

This flow switch uses 

l

/min 

as the flow rate indicator 
unit. The mass flow is 
converted and displayed 
under the conditions of 0

°

and 101.3 kPa.
The conversion conditions 
can be switched to 20

°

and 101.3 kPa with high 
flow type switches.

1. 

Perform periodical inspections to ensure 
proper operation of the switch.

Unexpected malfunctions may cause possible danger.

2. Take precautions when using the switch for an 

interlock circuit.

When a pressure switch is used for an interlock circuit, devise 
a multiple interlock system to prevent trouble or 
malfunctioning, verify the operation of the switch and interlock 
function on a regular basis.

3. Do not disassemble or perform any conversion 

work on flow switches.

Maintenance

Warning

Measured Fluid

Warning

∗ 

 Top view

16-11-34

Summary of Contents for 1F3 0 Series

Page 1: ...e Rc NPT G 1F3 0 1F3 1 1F3 3 Flow rate measuring range l min 14 to 60 20 to 150 36 to 2600 1ab 3 4 1 1 Page 16 12 1 Page 16 12 6 Digital Flow Switch Mechanical Flow Switch Digital Flow Switch for Air Series PF2A Refer to page 16 11 7 Digital Flow Switch for Water Series PF2W Refer to page 16 11 17 Digital Flow Switch for Deionized Water and Chemicals Series PF2D Refer to page 16 11 37 16 11 1 ZSE ...

Page 2: ...n the other hand tightening below the specified tightening torque may cause the installation screws to come loose during operation 2 Apply a wrench only to the metal part of the piping when installing the flow switch in the system piping Do not apply a wrench to the plastic part of the main housing of the switch 3 Monitor the flow direction of the fluid Install a switch in the direction as indicat...

Page 3: ... in an environment where temperature changes drastically even within the allowable ambient temperature range 1 Perform periodical inspections to ensure proper operation of the switch Unexpected malfunctions and wrong operations may not secure the safety 2 Use caution when using a switch for an interlock circuit When a pressure switch is used for an interlock circuit devise a multiple interlock sys...

Page 4: ...0 to 12000 0 5 to 4 2 to 16 5 to 40 10 to 100 0 5 to 4 2 to 16 5 to 40 Flow control of cooling water for wafer temperature regulation and high frequency electric power supply Application examples Flow control of N2 gas to prevent detection camera shimmering and lead frame oxidation Flow control of pressurized cooling water for welding gun MULTI COUNTER CEU5 A COM COM COM B DC12V GND F G R S HOLD B...

Page 5: ...l min 6000 l min 3000 l min PF2A510 550 511 521 551 PF2A30 31 Integrated display type Remote type Display unit Sensor unit Output specifications Port size Rc NPT G 1 8 1 4 3 8 1 2 11 2 1 2 Switch output Analog output Accumulated pulse output 0 5 to 4 2 to 16 5 to 40 10 to 100 Flow rate measurement range l min PF2W30 33 PF2W704 720 740 711 PF2W504 520 540 511 Integrated display type Remote type Dis...

Page 6: ...ion in X Y Z directions for 2 hrs each 490 m s2 in X Y Z directions 3 times each 1000 Vp p Pulse width 1 µs Rise time 1 ns 1 2 3 4 3 8 1 2 3 8 660 g Display units are the same as those of remote type digital flow switch for water series PF2W3 Refer to page 16 13 19 for details Note 1 The system accuracy when combined with PF2W3 Note 2 Output system can be selected during initial setting Note 3 Wit...

Page 7: ...ssure loss MPa 4 0 3 5 3 0 2 5 2 0 1 5 1 0 0 5 Flow rate l min Pressure loss MPa Flow rate l min 10 12 14 16 2 0 4 6 8 0 02 0 03 0 04 0 05 0 01 Pressure loss MPa Flow rate l min 0 01 0 07 0 06 0 05 0 04 0 03 0 02 40 35 30 25 20 15 10 5 0 Material Stainless steel FKM PPS PPS Flow direction Connectors and operating unit descriptions are the same as Series PF2A for air Refer to page 16 11 10 16 11 28...

Page 8: ... 8 7 5 Main circuit Brown 1 DC Black 4 OUT White 2 NC Analog output Blue 3 DC Wiring PF2W5 T 2 Main Circuit 4 3 2 1 Connector pin numbers Use this sensor by connecting to SMC remote type display unit Series PF2W3 Pin no 1 2 3 4 Pin description DC NC Analog output DC OUT 0 5 2 5 4 16 40 PF2W504T 2 PF2W520T 2 PF2W540T 2 Part no Minimum measured flow rate value l min Maximum measured flow rate value ...

Page 9: ... for air only Check the load and wiring for OUT1 Check the load and wiring for OUT2 Perform the RESET operation and reset all data again Reduce the flow rate until it is within the flow rate measurement range using an adjustment valve Key lock This function prevents incorrect operations such as changing the set value accidentally Accumulation clearance This is to clear the accumulated value Initia...

Page 10: ...ircuit at the output side of the switch damage may still occur if a surge is applied repeatedly When a surge generating a load such as a relay or solenoid is directly driven use a type of switch with a built in surge absorbing element 4 Since the type of fluid varies depending on the product be sure to verify the specifications The switches do not have an explosion proof rating To prevent a possib...

Page 11: ...r 6 Use the switch within the specified fluid and ambient temperature range Fluid and ambient temperatures are 0 to 50 C Take measures to prevent freezing fluid when below 5 C since this may cause damage to the switch and lead to a malfunction The installation of an air dryer is recommended for eliminating condensate and moisture Never use the switch in an environment where there are drastic tempe...

Page 12: ... unit Switch measures at mass flow rates without being influenced by temperature and pressure The switches use l min as the flow rate indicator unit in which the volumetric flow is substituted for mass flow at 0 C and 101 3 kPa The volumetric flow rate at 20 C 101 3 kPa and 65 RH ANR can be displayed with the high flow rate type switches for air Others Measured Fluid Warning Warning Detection prin...

Page 13: ...in 50 l min 500 l min 525 l min 25 l min 0 5 l min 2 l min 5 l min 10 l min 20 l min 40 l min 100 l min For Air PF2A For Water PF2W Caution Set Flow Rate Range and Rated Flow Rate Range Set the flow rate within the rated flow rate range The regulating flow rate range is the range of flow rate that can be set on the controller The rated flow rate range is the range of flow rate that satisfies the s...

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