background image

Series 

PF2

, IF

Diaphragm Style Flow Switch: 

Series IFW

Paddle Style Flow Switch: 

Series IF3

Flow Switches

Model 

Contacts

Port size (Rc, NPT, G)

IFW510
IFW520
IFW550

Flow rate measuring range

(

l

/min)

1 to 10

10 to 20
20 to 50

1ab

3/8, 1/2, 3/4

Model 

Contacts

Port size (Rc, NPT, G)

1F3

0

1F3

1

1F3

3

Flow rate measuring range

(

l

/min)

14 to 60

20 to 150

36 to 2600

1ab

3/4

1
1

Page

16-12-1

Page

16-12-6

Digital Flow Switch

Mechanical Flow Switch

Digital Flow Switch for Air: 

Series PF2A 

························································· Refer to page 16-11-7.

 

Digital Flow Switch for Water: 

Series PF2W 

··················································· Refer to page 16-11-17.

 

Digital Flow Switch for Deionized Water and Chemicals: 

Series PF2D 

······ Refer to page 16-11-37.

 

16-11-1

ZSE

ISE

PSE

Z

I

SE3

PS

Z

I

SE

1
2

ZSP

ISA2

IS

ZSM

PF2

IF

Data

Summary of Contents for 1F3 0 Series

Page 1: ...e Rc NPT G 1F3 0 1F3 1 1F3 3 Flow rate measuring range l min 14 to 60 20 to 150 36 to 2600 1ab 3 4 1 1 Page 16 12 1 Page 16 12 6 Digital Flow Switch Mechanical Flow Switch Digital Flow Switch for Air Series PF2A Refer to page 16 11 7 Digital Flow Switch for Water Series PF2W Refer to page 16 11 17 Digital Flow Switch for Deionized Water and Chemicals Series PF2D Refer to page 16 11 37 16 11 1 ZSE ...

Page 2: ...n the other hand tightening below the specified tightening torque may cause the installation screws to come loose during operation 2 Apply a wrench only to the metal part of the piping when installing the flow switch in the system piping Do not apply a wrench to the plastic part of the main housing of the switch 3 Monitor the flow direction of the fluid Install a switch in the direction as indicat...

Page 3: ... in an environment where temperature changes drastically even within the allowable ambient temperature range 1 Perform periodical inspections to ensure proper operation of the switch Unexpected malfunctions and wrong operations may not secure the safety 2 Use caution when using a switch for an interlock circuit When a pressure switch is used for an interlock circuit devise a multiple interlock sys...

Page 4: ...0 to 12000 0 5 to 4 2 to 16 5 to 40 10 to 100 0 5 to 4 2 to 16 5 to 40 Flow control of cooling water for wafer temperature regulation and high frequency electric power supply Application examples Flow control of N2 gas to prevent detection camera shimmering and lead frame oxidation Flow control of pressurized cooling water for welding gun MULTI COUNTER CEU5 A COM COM COM B DC12V GND F G R S HOLD B...

Page 5: ...l min 6000 l min 3000 l min PF2A510 550 511 521 551 PF2A30 31 Integrated display type Remote type Display unit Sensor unit Output specifications Port size Rc NPT G 1 8 1 4 3 8 1 2 11 2 1 2 Switch output Analog output Accumulated pulse output 0 5 to 4 2 to 16 5 to 40 10 to 100 Flow rate measurement range l min PF2W30 33 PF2W704 720 740 711 PF2W504 520 540 511 Integrated display type Remote type Dis...

Page 6: ...ion in X Y Z directions for 2 hrs each 490 m s2 in X Y Z directions 3 times each 1000 Vp p Pulse width 1 µs Rise time 1 ns 1 2 3 4 3 8 1 2 3 8 660 g Display units are the same as those of remote type digital flow switch for water series PF2W3 Refer to page 16 13 19 for details Note 1 The system accuracy when combined with PF2W3 Note 2 Output system can be selected during initial setting Note 3 Wit...

Page 7: ...ssure loss MPa 4 0 3 5 3 0 2 5 2 0 1 5 1 0 0 5 Flow rate l min Pressure loss MPa Flow rate l min 10 12 14 16 2 0 4 6 8 0 02 0 03 0 04 0 05 0 01 Pressure loss MPa Flow rate l min 0 01 0 07 0 06 0 05 0 04 0 03 0 02 40 35 30 25 20 15 10 5 0 Material Stainless steel FKM PPS PPS Flow direction Connectors and operating unit descriptions are the same as Series PF2A for air Refer to page 16 11 10 16 11 28...

Page 8: ... 8 7 5 Main circuit Brown 1 DC Black 4 OUT White 2 NC Analog output Blue 3 DC Wiring PF2W5 T 2 Main Circuit 4 3 2 1 Connector pin numbers Use this sensor by connecting to SMC remote type display unit Series PF2W3 Pin no 1 2 3 4 Pin description DC NC Analog output DC OUT 0 5 2 5 4 16 40 PF2W504T 2 PF2W520T 2 PF2W540T 2 Part no Minimum measured flow rate value l min Maximum measured flow rate value ...

Page 9: ... for air only Check the load and wiring for OUT1 Check the load and wiring for OUT2 Perform the RESET operation and reset all data again Reduce the flow rate until it is within the flow rate measurement range using an adjustment valve Key lock This function prevents incorrect operations such as changing the set value accidentally Accumulation clearance This is to clear the accumulated value Initia...

Page 10: ...ircuit at the output side of the switch damage may still occur if a surge is applied repeatedly When a surge generating a load such as a relay or solenoid is directly driven use a type of switch with a built in surge absorbing element 4 Since the type of fluid varies depending on the product be sure to verify the specifications The switches do not have an explosion proof rating To prevent a possib...

Page 11: ...r 6 Use the switch within the specified fluid and ambient temperature range Fluid and ambient temperatures are 0 to 50 C Take measures to prevent freezing fluid when below 5 C since this may cause damage to the switch and lead to a malfunction The installation of an air dryer is recommended for eliminating condensate and moisture Never use the switch in an environment where there are drastic tempe...

Page 12: ... unit Switch measures at mass flow rates without being influenced by temperature and pressure The switches use l min as the flow rate indicator unit in which the volumetric flow is substituted for mass flow at 0 C and 101 3 kPa The volumetric flow rate at 20 C 101 3 kPa and 65 RH ANR can be displayed with the high flow rate type switches for air Others Measured Fluid Warning Warning Detection prin...

Page 13: ...in 50 l min 500 l min 525 l min 25 l min 0 5 l min 2 l min 5 l min 10 l min 20 l min 40 l min 100 l min For Air PF2A For Water PF2W Caution Set Flow Rate Range and Rated Flow Rate Range Set the flow rate within the rated flow rate range The regulating flow rate range is the range of flow rate that can be set on the controller The rated flow rate range is the range of flow rate that satisfies the s...

Reviews: