19
|
P a g e
INSTALLATION
C
ONNECT TO THE
V
ACUUM
S
UPPLY
Always disconnect the oven from its power supply when working in the vacuum plumbing cabinet.
Use of clamps to secure tubing to the Vacuum Port and Chamber Vent is recommended.
Continued on next page
Cabinet Ports
Vent port
, ¼ inch
(6.35mm). A purge gas
supply line can be
connected to this intake
vent.
Vacuum Port
, KF-25
and
3/8 inch (9.52 mm) Line
Vacuum Connection
Connect an external vacuum
supply to the KF-25 vacuum
flange.
Cabinet Vacuum and
Vent Ports Cutaway
- Or -
Install a pump in the vacuum
plumbing cabinet. Connect the
pump to the cabinet vacuum port.
Cabinet Power Supply
NEMA 6-20R
Oil Drain Tray
The oven is rated to 10 millitorrs
Summary of Contents for SVAC9-2
Page 1: ...Installation Operation Manual SVAC9 2 Vacuum Oven 230 Voltage...
Page 8: ...8 P a g e INTRODUCTION...
Page 12: ...12 P a g e RECEIVING...
Page 22: ...22 P a g e GRAPHIC SYMBOLS...
Page 26: ...26 P a g e CONTROL OVERVIEW...