SevenStar D07-60B Instruction Manual Download Page 21 | Manualshive

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Page 18 of 26

6.8

D07-60B,60BM Ordering Code

D07

-

[t] [g,g,g] [r,r,r,r] [f,f] [s] [m] [d]

[t]

–

Type Number

- [60B ] MFC

- [60BM] MFM

[g,g,g]

–

Gas

Please consult SEMI52-0302
For Example:
-[ 013 ] N

2

-[ 007 ] H

2

-[ 000 ] Mixture gases (please consult [d] for detail)

[r,r,r,r]

–

Flow Range Full Scale

- [300L]    300SLM
- [500L]    500SLM
- [750L]    750SLM
- [1K0L]    1000SLM
- [1K5L]    1500SLM
- [ 2K0L]    2000SLM
- [ 000C]    Customer Special Request (please consult [d] for detail)

[f,f]

–

Inlet and Outlet Fittings

-[JJ ]

Compression Fitting

φ

10mm (F.S.=300SLM)

-[SS]

Compression Fitting

1/2"(F.S

.≤

1000SLM)

-[XX ]

Customer Special fittings (please consult [d] for detail)

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Summary of Contents for D07-60B

Page 1: ...D07 60B Mass Flow controller D07 60BM Mass Flow Meter INSTRUCTION MANUAL 2017 03...

Page 2: ...this manual thoroughly before performing any operation This manual will enable the full information necessary for installation operation and ease of maintenance to be realized Should you require any a...

Page 3: ...Connection 11 6 6 Operation Pressure Resistance 17 4 5 Zero Adjustment 13 6 7 Calibration and Conversion 17 5 OPERATION INSTRUCTIONS 14 6 8 D07 60B 60BM Ordering Code 18 5 1 MFC Operation 14 7 TROUBLE...

Page 4: ...taxy CVD plasma etching sputtering ion implantation vacuum deposition equipment optical fiber melting micro reaction equipment mixing matching gas system capillary flow control system gas chromatograp...

Page 5: ...erature 5 45 9 Input Signal 0 5 00 V Input Resistance 500K NO 10 Output Signal 0V 5 00 V Output Electric Current 3mA 11 Valve Type N C Solenoid NO 12 Power Supply 15V 50 mA 15V 200 mA 15V 50 mA 15V 50...

Page 6: ...nsor heated the flow signal which was measured by electric bridge and amplified it through amplifier the amplified flow testing voltage is compared with presetting voltage the differential signal will...

Page 7: ...he channels flow outputting signal is 0 5VDC The Flow control ranges of MFC is 2 100 F S flow resolving power is 0 1 F S Attention When Valve controller of MFC is posited on position of PURGE it can b...

Page 8: ...valves control switches on the panel of D08 series Flow Readout Box CLOSE PURGE and AUTO In case of CLOSE Valves of MFC will shut off in case of PURGE Valve will open reach to the tip to purge the Gas...

Page 9: ...Page 6 of 26 Flange D K L DIN DN15 PN40 95 65 14 DIN DN20 PN40 105 75 14 DIN DN25 PN40 115 85 14 Figure 3b Dimension of D07 60B MFC With Flange...

Page 10: ...Page 7 of 26 Figure 3c Dimension of D07 60BM MFM With 1 2 10 Compression Fitting Fitting...

Page 11: ...Figure 3d Dimension of D07 60BM MFC With Flange Attention The height of figure 3a 3b 3c 3d are height without electric connectors of cable It should be added around 50mm more after adding the electri...

Page 12: ...gure 4 is an example to showing the fitting structure please be careful the flow input output direction should not be inversed fitted Figure 4 Compression Fitting Connector Installation Attention For...

Page 13: ...tion of D07 60BM MFM Electrical Interfacing D07 60BM MFM electrical interfacings figure6 is as same as connector of D07 60B MFC only compared with MFC accessories that lacks of Valve Control and Setpo...

Page 14: ...meter had settled it could be used a 3 3K multi turn potentiometer to connect to the external control signal socket of 5 00V and signal common It also could be directly connecting with modulus D A con...

Page 15: ...common connects signal reference point low current common and heavy current power common down lead separately and connects together to the 15V power supply common port If users need PC performs AUTO O...

Page 16: ...or adjust it while removed its overall Please note it should be sure that gas flow tube could not be open while zero adjustment or shutoff the valves it should be warming up not less than 15 minutes...

Page 17: ...tches and flow setting potentiometer are in the front of Readout Box panel the flow setting internal or external signal control switches are on the back of panel of Readout Box When the switch is turn...

Page 18: ...n overshooting 5 1 2 PURGE When need air blasting and cleaning bypass and tube users could turn the switch on PURGE position during the purging flow rate value should reach up to times or even several...

Page 19: ...rosive Gas The materials of bypass are anti caustic materials like 00Cr17Ni14Mo2 same as 316Lstainless steel Teflon and Viton When users operate in condition of without vapor low leakage regular clean...

Page 20: ...rage of specification of inlet and outlet Especially while operating under the high pressure situation the big differential pressure will affect flow fail to shut off or lower adjustment In case of us...

Page 21: ...0 Mixture gases please consult d for detail r r r r Flow Range Full Scale 300L 300SLM 500L 500SLM 750L 750SLM 1K0L 1000SLM 1K5L 1500SLM 2K0L 2000SLM 000C Customer Special Request please consult d for...

Page 22: ...B 300 1000SLM 0 25 0 50 MPa 1500 2000SLM 0 40 0 60 MPa D07 60BM 300 2000SLM 0 2MPa Max Operating Pressure 3 MPa Calibration Temperature 22 2 S Customer Special Requirements For Example The letters on...

Page 23: ...cale 1000SLM Inlet and Outlet Fittings Compression Fitting 1 2 Seal Materials Viton Mounting Position Horizontal Customer Special Requirements For Example The letters on cover and Tag in English Diffe...

Page 24: ...ter 2 2 Power supply failure Check Power supply voltages 24VDC 2 3 Sensor failure Replace the new sensor 2 4 Amplifier or other circuits failure Replace amplifier or repair circuit 3 In case of valve...

Page 25: ...g 7 Flow display is in accurate 7 1 The range or unit of Display is not matching to controller Re adjust Display 7 2 Bypass is polluted to cause the flow rate excursion Clean MFC and re calibrate it 7...

Page 26: ...and particle free which means a filter 30 must be fitted in the gas line upstream of the MFC MFM b Gas must comply with the pressure specifications and never exceed the rated value c Process gas shou...

Page 27: ...0 5318 0 7150 0 719 C2H2 042 0 4049 1 1620 0 581 C2H4 038 0 3658 1 2510 0 598 C2H6 054 0 4241 1 3420 0 481 C3H4 068 0 3633 1 7870 0 421 C3H6 069 0 3659 1 8770 0 398 C3H8 089 0 3990 1 9670 0 348 C4H6...

Page 28: ...0 Ne 002 0 2464 0 9000 1 415 NH3 029 0 5005 0 7600 0 719 NO 016 0 2378 1 3390 0 976 NO2 026 0 1923 2 0520 0 741 N2O 027 0 2098 1 9640 0 709 O2 015 0 2196 1 4270 0 992 PCl3 193 0 1247 6 1270 0 358 PH3...

Page 29: ...heat of the gas N Structure factors of gas molecule See Table 6 Table 6 Gas Molecule Composing factors COMPOSITION EXAMPLE N VALUE Single atom numerator Ar He 1 01 Double atom numerator CO N2 1 00 Tr...

Page 30: ...Rm 722 Bldg 29 No 368 Zhangjiang Rd Pudong New Area Shanghai China Tel 86 21 63532370 Fax 86 21 63533265 Shenzhen Office Room 712 Section B Qiche Tower No 45 Zhenhua Road Futian District Shenzhen Chin...

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