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2. SPECIFICATION
Table 1. Specifications of D07-60B MFC and D07-60BM MFM
NO
Item
D07-60B
D07-60BM
1
Flow Ranges
300
，
500
，
750
，
1000
，
1500
，
2000SLM
2
Accuracy
± 2% F.S.
3
Linearity
±1% F.S.
4
Repeatability
±0.2%F.S.
5
Response-Time
＜
10 sec
6
Operation
Pressure
(0.25 ~ 0.5) MPa
（≤
1000SLM
）
(0.4 ~ 0.6) MPa
（＞
1000SLM
）
＜
0.2 MPa
7
Max Pressure
3 MPa
8
Operation
Temperature
5~ 45
℃
9
Input Signal
0 ~ 5.00 V
(Input Resistance > 500K)
NO
10
Output Signal
0V ~ 5.00 V (Output Electric Current ≤3mA)
11
Valve Type
N.C. Solenoid
NO
12
Power Supply
+15V 50 mA
-15V 200 mA
+15V 50 mA
-15V 50 mA
13
Dimension (mm)
According to Figure 3a
、
3b
、
3c
、
3d
14
Weight (kg)
6
5
Notes :
MFC/MFM is calibrated by N
2
as a standard gas.
Units: SCCM (Standard Cubic Centimeter/Min);
SLM (Standard Liter/Min)
Standard Situation: Tem
— 273.15K ( 0
ºC
);
Air Pressure
— 101325 Pa (760mm Hg)
For Sevenstar MFC/MFM, the unit of SCCM is identical to
“mL/min, 0 ºC ,1atm”, and the unit of SLM
