7.0 Specifications
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7
.0 Specifications
Scan axes
x, y and z with focus drive
Galvos
CT 6215
Maximum scan speed
500 Hz extended periods,
1 kHz short periods < 5 min
Input beam diameter
< 3 mm
Beam diameter at pupil
< 10.5 mm
Resolution
Diffraction limited
Max scan range of Scanhead
+/-7.6 degrees optical
Voltage/opt.deg.
0.25 typ.