SC-04
Appendix C: Interference Information • 93
ESR-A13D-PH3, PH
3
Detection
Gas
Chemical
Formula
Concentration
Indication
Value
Acetone
C
3
H
6
O
0.54 vol%
0.01 ppm
Acetylene
C
2
H
2
99.7 ppm
20.01 ppm
Ammonia
NH
3
40.9 ppm
0.00 ppm
Arsine
AsH
3
1.07 ppm
0.80 ppm
Bromomethane
CH
3
Br
150 ppm
0.01 ppm
Carbon Dioxide
CO
2
20.0 vol%
0.00 ppm
Carbon Monoxide
CO
100 ppm
0.03 ppm
Diborane
B
2
H
6
5.1 ppm
1.14 ppm
Disilane
Si
2
H
6
7.2 ppm
6.54 ppm
Ethanol
C
2
H
5
OH
8333 ppm
0.00 ppm
Ethyl Acetate
C
4
H
8
O
2
0.53 vol%
0.01 ppm
Hydrogen
H
2
500 ppm
0.05 ppm
Hydrogen Chloride
HCl
8.0 ppm
0.00 ppm
Hydrogen Cyanide
HCN
5.0 ppm
0.39 ppm
Hydrogen Selenide
H
2
Se
10 ppm
4.45 ppm
Hydrogen Sulfide
H
2
S
25.0 ppm
10.60 ppm
Isopropyl Alcohol
C
3
H
8
O
0.50 vol%
0.02 ppm
Methane
CH
4
2.56 vol%
0.00 ppm
Methanol
CH
3
OH
1.38 vol%
0.00 ppm
Nitrogen Dioxide
NO
2
5.0 ppm
-1.28 ppm
Nitrogen Monoxide
NO
100 ppm
-0.44 ppm
Propylene
C
3
H
6
0.5 vol%
1.99 ppm
Silane
SiH
4
7.2 ppm
4.08 ppm
Sulphur Dioxide
SO
2
8.0 ppm
0.00 ppm
Toluene
C
7
H
8
1.0 vol%
-2.01 ppm
Xylene
C
8
H
10
1.0 vol%
-1.04 ppm