
2011 NEW PRODUCTS
Please be sure to read before handling the product. Please refer to "safety instructions", "common safety instructions for products listed in this manual", "common safety instructions for flow controller" from page 24 through 35.
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3. Flow rate unit
Caution
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The flow rate of this product is measured by mass flow not depended with temperature and pressure. Unit is L/min where mass flow is
converted to volumetric flow at 20°C and 1 atmospheric pressure (101kPa).
4. Overflow
Caution
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Even if twice as much overflow as each series measuring range is applied to the sensor, it is no problem, however, if dynamic pressure
is applied near to the maximum working pressure (when the pressure applied to the primary side with the secondary side released), the
sensor may fail. If dynamic pressure is applied such as feeding workpiece during leakage inspection, please always provide a by-pass
circuit or a needle valve to avoid applying dynamic pressure to the sensor.
5. Suction lift verification, etc.
Cautions
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When using this product with suction lift verification, etc., select the flow rate range according to vacuum range and vacuum nozzle
diameter. Refer to Page 22 “How to select flow sensor.”
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When using this product with suction lift verification, etc., please always install an air filter onto the upstream of suction side to prevent
suction of foreign materials.
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When using this product with suction lift verification, etc., considering atmospheric dew point and ambient temperature of this product,
please use the product under the conditions that dew condensations will not be formed in the inside of pipe.
■
When using this product with suction lift verification, etc., response time may delay per piping volume between the sensor and vacuum
nozzle. In that case, please take measures such as, reducing piping volume, etc.
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When using the product with vacuum applications such as air aspiration, etc., please do not bend the tube near the quick-fitting. If
stress is applied to the tube near the quick-fitting, please insert the tube into the quick-fitting after inserting the insert-ring.
■
When the sensor for suction lift verification is replaced from the pressure sensor (switch) to the flow sensor (switch), in the image
(refer to below figure), the theory of sensor output (switch output) is reversed. Care must be taken since change and modification
of sequence program of PLC are required. If source pressure/vacuum is not supplied especially when equipment power turned on,
problems must not be created in sequence program, etc., of PLC since flow sensor (switch) maintains “Flow-rate 0”=”Sensor output
(switch output) ON”.
Pressure sensor (switch)
Flow sensor (switch)
ON at set-point or over
Atmospheric pressure side
ON
OFF
High vacuum side Flow-rate 0 side Flow-rate large side
ON at set-point or below
ON
OFF
Suction lift verification