3 Product Description
12
Version: 1.1.0
PZ247E
P-63x Nanopositioner
3.6
Technical Features
3.6.1
PICMA® Piezo Actuators
P-63x positioners are driven by PICMA® piezo actuators. PICMA® actuators have all-ceramic
insulation and their performance and lifetime are therefore far superior to conventional
actuators. The ceramic insulation layer protects the monolithic piezoceramic block against
humidity and failure due to increased leakage current. In this way, an especially high reliability
is achieved even under extreme ambient conditions. In contrast to motorized drives, there are
no rotating parts or friction. The piezo actuators are therefore free of backlash, maintenance,
and wear.
3.6.2
Flexure Guides
P-63x positioners have flexure guides for friction-free motion and high guiding accuracy.
A flexure guide is an element that is free of static and sliding friction. It is based on the elastic
deformation (bending) of a solid (e.g., steel) and does not have any rolling or sliding parts.
Flexure elements have a high stiffness and load capacity. Flexure guides are maintenance and
wear free. They are 100% vacuum compatible, function in a wide temperature range and do not
require any lubricants.
3.6.3
Capacitive Sensors
Capacitive sensors measure the position directly on the platform (direct metrology) and work
without contact. Neither friction nor hysteresis interferes with the motion, which allows
excellent linearity values to be achieved together with the high position resolution. In
conjunction with suitable electronics, capacitive sensors achieve the best resolution, stability,
and bandwidth.
3.6.4
ID Chip
An ID chip is in the D-sub connector of the P-63x. When the P-63x is calibrated at the factory
with digital electronics, the calibration data is saved on the ID chip together with specific
product information. After switching on, the digital electronics read the data from the ID chip of
the P-63x connected. A P-63x with an ID chip containing calibration data can therefore be
connected to any suitable digital electronics without renewed calibration.
Refer to the manual for the controller for more information on the ID chip.
