10 Technical Data
44
Version: 1.1.0
PZ268D
P-616 NanoCube® XYZ Nanopositioner
5
GND
ID chip ground, channel 2
6
Bidirectional
Data line for ID-Chip, channel 2
7
-
-
8
Input
Piezo v, channel 3
9
Input
Piezo v, channel 2
10
Input
Piezo v, channel 1
11
Input
Target sensor signal, channel 1
(moving part of the capacitive sensor)
12
GND
Shielding for target sensor signal, channel 2
13
GND
Shielding for target sensor signal, channel 3
14
-
-
15
-
-
16
GND
ID chip ground, channel 3
17
Bidirectional
Data line for ID-Chip, channel 3
18
-
-
19
Input
Piezo voltage –, channel 3
20
Input
Piezo voltage –, channel 2
21
Input
Piezo voltage –, channel 1
22
GND
Shielding for target sensor signal, channel 1
* The "-" sign indicates that the corresponding pin has not been assigned.