manualshive.com logo in svg

PI P-616 NanoCube, User Manual, Page: 1 / 51

Share
Download
PI P-616 NanoCube User Manual Download Page 1

 

 

Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany 
Phone +49 721 4846-0, Fax +49 721 4846-1019, Email [email protected], www.pi.ws 

 

PZ268D 

P-616 NanoCube® XYZ Nanopositioner 

User manual 

Version: 1.1.0 

 

Date: 14.01.2022 

 

This document describes the following product: 

 

P-616.3C

 

Parallel-kinematic NanoCube® XYZ 

nanopositioner, 100 µm × 100 µm × 100 µm 

travel range, capacitive sensors 

Summary of Contents for P-616 NanoCube

Page 1: ...1 4846 0 Fax 49 721 4846 1019 Email info pi ws www pi ws PZ268D P 616 NanoCube XYZ Nanopositioner User manual Version 1 1 0 Date 14 01 2022 This document describes the following product P 616 3C Paral...

Page 2: ...mbH Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH Co KG retains all the rights The use of any text...

Page 3: ...e of Delivery 10 3 4 Optional Accessories 11 3 5 Suitable Electronics 11 3 6 Technical Features 12 3 6 1 PICMA Piezo Actuators 12 3 6 2 Flexure Guides 12 3 6 3 Capacitive sensors 12 4 Unpacking 13 5 I...

Page 4: ...Service 37 10 Technical Data 39 10 1 Specifications 39 10 1 1 Data Table 39 10 1 2 Maximum Ratings 40 10 1 3 Ambient Conditions and Classifications 41 10 2 Dimensions 42 10 3 Torque for Stainless Stee...

Page 5: ...ng the P 616 as intended Basic knowledge of servo systems drive technologies and suitable safety measures is assumed 1 2 Symbols and Typographic Conventions The following symbols and typographic conve...

Page 6: ...viate from the actual circumstances Photographic illustrations may also differ and must not be seen as guaranteed properties 1 4 Other Applicable Documents The devices and software tools from PI menti...

Page 7: ...r e g P 882 or the product family e g PICMA bender 3 Click the corresponding product to open the product detail page 4 Click the Downloads tab The manuals are shown under Documentation Software manual...

Page 8: ......

Page 9: ...read out and process the signals of the position sensors 2 2 General Safety Instructions The P 616 is built according to state of the art technology and recognized safety standards Improper use can r...

Page 10: ...l forces can damage or misalign the P 616 Avoid impacts that affect the P 616 Do not drop the P 616 Do not exceed the maximum permissible stress and load capacities according to the specifications p 3...

Page 11: ...y P 616 NanoCube XYZ Nanopositioner PZ268D Version 1 1 0 7 Personnel qualification The P 616 may only be installed started operated maintained and cleaned by authorized and appropriately qualified per...

Page 12: ......

Page 13: ...roduct View Figure 1 P 616 1 Base body 2 M2 hole for mounting the load depth 2 5 mm 3 2 holes 3 XYZ mounting platform moving part of the P 616 also designated motion platform 4 Countersunk bore 2 for...

Page 14: ...to the manual Old equipment disposal p 45 WWW PI WS Manufacturer s address website CE conformity mark Symbol for the protective earth conductor marks the protective earth connector of the P 616 p 16 F...

Page 15: ...les 1 25 mm 2 5 mm and 3 2 mm F 603 42 Fiber holder 10 for P 616 long with fiber optic ferrules 1 25 mm 2 5 mm and 3 2 mm F 603 43 Fiber holder 90 for P 616 with fiber optic ferrules 1 25 mm 2 5 mm an...

Page 16: ...dity and failure due to increased leakage current In this way an especially high reliability is achieved even under extreme ambient conditions In contrast to motorized drives there are no rotating par...

Page 17: ...may not be subject to mechanical stress Left Cover for the bottom of the P 616 right The surfaces of the XYZ mounting platform 1 Unpack the P 616 with care Do not exert any force onto the following po...

Page 18: ......

Page 19: ...charge the positioner s piezo actuators before installing Connect the positioner to the switched off PI electronics equipped with an internal discharge resistor Do not pull the plug connector out of t...

Page 20: ...e damage Pay attention to the torque range p 43 specified for the screws used during installation INFORMATION Extension cables can reduce the positioning accuracy of the P 616 or affect sensor process...

Page 21: ...arth conductor profile view 1 Base body of the P 616 2 Flat washer 3 Lock washer 4 Screw 5 Cable lug 6 Protective earth conductor Connecting the P 616 to the Protective Earth Conductor 1 If necessary...

Page 22: ...re changes Mount the P 616 only onto surfaces that have the same or similar thermal expansion properties as the P 616 NOTICE Protruding screw heads Protruding screw heads can damage the P 616 Ensure t...

Page 23: ...ted to the electronics Tools and accessories 2 M3 screws of suitable length at least M3x25 Optional 2 locating pins e g 2m6 or 2h6 of suitable length for holes 2 mm H7 Suitable screwdriver For the dim...

Page 24: ...ng the XYZ mounting platform when you loosen the screws hold onto it tightly to avoid an excessive torque to the flexures NOTICE Warping the P 616 when fixing loads with an uneven contact surface Fixi...

Page 25: ...ong screws The P 616 could be damaged by screws inserted too deeply Pay attention to the depth of the mounting holes in the platform p 42 Use screws of the correct length for the respective mounting h...

Page 26: ...16 NanoCube XYZ Nanopositioner Center of load at the optimum position Figure 7 Example of an optimally placed load 1 Load center Center of load at an unsuitable position Figure 8 Tall load and center...

Page 27: ...latform Figure 10 Holes for fixing the load Requirements You have read and understood the general notes on installation p 15 The P 616 is not connected to the electronics Tools and accessories M2 scre...

Page 28: ...ning the screws and adhere to the torque range p 43 specified for the screws Pay attention to the maximum screw in depth of 2 5 mm Fix the load so that its center is in the middle of the XYZ mounting...

Page 29: ...and understood the general notes on installation p 15 The P 616 is not connected to the electronics Tools and accessories Suitable fiber holder with the respective screws Suitable Phillips head screwd...

Page 30: ...to the E 727 controller 1 Plug the connector of the P 616 into the corresponding socket of the controller see user manual of the controller 2 Use the integrated screws to secure the connection against...

Page 31: ...5 Installation P 616 NanoCube XYZ Nanopositioner PZ268D Version 1 1 0 27 P3 to P for channel 3 SERVO 3...

Page 32: ......

Page 33: ...th conductor before restarting NOTICE Destruction of the piezo actuator due to electric flashovers Using the P 616 in environments that increase the electrical conductivity can lead to the destruction...

Page 34: ...d and or dynamics requires the servo control parameters to be adjusted The P 616 is operated near to its resonant frequency If you notice oscillation In closed loop operation switch off the servo mode...

Page 35: ...ge resistor inside the electronics from PI Discharging a positioner connected to the electronics In closed loop operation 1 Switch off the servo mode on the controller 2 Set the piezo voltage to 0 V o...

Page 36: ......

Page 37: ...mal alignment of mechanical components and piezo actuators Loosened screws cause a loss in positioning accuracy Loosen screws only when instructed in this manual Do not open the P 616 7 2 Cleaning the...

Page 38: ......

Page 39: ...ounting platform Mount the P 616 onto surfaces with the following characteristics only Flatness of at least 100 m The thermal expansion properties are similar to those of the P 616 e g surfaces made o...

Page 40: ...ponding positioning axes 2 Check the servo control parameter settings on the controller 3 Adjust the servo control parameters on the controller according to the load change Open loop operation near to...

Page 41: ...nformation Product and serial numbers of all products in the system Firmware version of the controller if applicable Version of the driver or the software if applicable Operating system on the PC if a...

Page 42: ......

Page 43: ...positioning Active axes X Y Z Travel range at 20 to 120 V open loop 110 axis m 20 0 Travel range closed loop 100 axis m 20 0 Resolution 1 open loop 0 3 nm Typ Resolution 1 closed loop 0 4 nm Typ Linea...

Page 44: ...nd the measuring technology because PI piezo nanopositioning systems are free of friction 10 1 2 Maximum Ratings P 616 positioners are designed for the following operating data Maximum operating volta...

Page 45: ...on For indoor use only Maximum altitude 2000 m Air pressure 1100 hPa to 700 hPa Relative humidity Highest relative humidity 80 for temperatures up to 31 C Decreasing linearly to 50 relative humidity a...

Page 46: ...chnical Data 42 Version 1 1 0 PZ268D P 616 NanoCube XYZ Nanopositioner 10 2 Dimensions Dimensions in mm Note that the decimal points are separated by a comma in the drawings Figure 14 P 616 3C 1 Cable...

Page 47: ...ction A1 inner conductor Output Probe sensor signal channel 2 immovable part of the capacitive sensor A1 line conductor GND Shielding for probe sensor signal channel 2 A2 inner conductor Output Probe...

Page 48: ...nsor signal channel 1 moving part of the capacitive sensor 12 GND Shielding for target sensor signal channel 2 13 GND Shielding for target sensor signal channel 3 14 15 16 GND ID chip ground channel 3...

Page 49: ...international national and local rules and regulations In order to fulfil its responsibility as the product manufacturer Physik Instrumente PI GmbH Co KG undertakes environmentally correct disposal of...

Page 50: ......

Page 51: ...tions of conformity were issued according to the following European statutory requirements Low Voltage Directive EMC Directive RoHS Directive The standards applied for certifying conformity are listed...

Reviews:

No comments