10 Technical Data
N565 NEXACT® Linear Stage
MP148E
Version: 1.4.0
33
In this Chapter
Specifications ............................................................................................................................... 33
Maximum Ratings ........................................................................................................................ 35
Dimensions .................................................................................................................................. 36
Pin Assignment ............................................................................................................................ 37
10.1
Specifications
10.1.1
Data Table
Motion
N565.160 N565.260 N565.360 Unit
Tolerance
Active axes
X
X
X
Travel range
13
26
52
mm
Velocity, closed loop
10
10
10
mm/s
Max.
Unidirectional
repeatability
±50
±50
±50
nm
±100 %
Pitch
50
100
200
µrad
+80 %
Yaw
50
50
50
µrad
+60 %
Mechanical properties N565.160 N565.260 N565.360 Unit
Tolerance
Load capacity in z
20
20
20
N
Max.
Overall mass
0.3
0.4
0.6
kg
±5 %
Drive properties
N565
Unit
Tolerance
Drive type
NEXACT® piezo walking drive
Push/pull force
10
N
Max.
Holding force (passive) 10
N
Min.
10
Technical Data
