Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone +49 721 4846-0, Fax +49 721 4846-1019, Email [email protected], www.pi.ws
MP148E
N565 NEXACT® Linear Stage
User Manual
Version: 1.4.0
Date: 10.06.2020
This document describes the following products:
N565.160
Precision linear stage, 13 mm travel range,
PIOne linear encoder, 0.5 nm resolution, 10 N
drive force, dimensions 65 × 80 × 20 mm (W × L
× H), NEXACT® piezoelectric walking drive
N565.260
Precision linear stage, 26 mm travel range,
PIOne linear encoder, 0.5 nm resolution, 10 N
drive force, dimensions 65 × 110 × 20 mm (W ×
L × H), NEXACT® piezoelectric walking drive
N565.360
Precision linear stage, 52 mm travel range,
PIOne linear encoder, 0.5 nm resolution, 10 N
drive force, dimensions 65 × 160 × 20 mm (W ×
L × H), NEXACT® piezoelectric walking drive
