Technical Note
H811T0019, valid for H-811.D2 and H-811.S2
Bro, MMa, 9/5/2016
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Page 8 / 12
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,
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Technical Data
Data Table
H-811.D2
H-811.S2
Unit
Tolerance
Active axes
X, Y, Z, θ
X
, θ
Y
, θ
Z
X, Y, Z, θ
X
, θ
Y
, θ
Z
Motion and positioning
Travel range* X, Y, Z
±17, ±16, ±6.5
±17, ±16, ±6.5
mm
Travel range* θ
X
, θ
Y
, θ
Z
±10, ±10, ±21
±10, ±10, ±21
°
Single-actuator design resolution
40
80
nm
Min. incremental motion X, Y
0.25
1
µm
typ.
Min. incremental motion Z
0.1
0.5
µm
typ.
Min. incremental motion θ
X
, θ
Y
, θ
Z
3
7
µrad
typ.
Backlash X, Y
0.2
2
µm
typ.
Backlash Z
0.06
0.5
µm
typ.
Backlash θ
X
, θ
Y
4
20
µrad
typ.
Backlash θ
Z
4
30
µrad
typ.
Repeatability X, Y
±0.15
±0.3
µm
typ.
Repeatability Z
±0.06
±0.1
µm
typ.
Repeatability θ
X
, θ
Y
±2
±4
µrad
typ.
Repeatability θ
Z
±3
±8
µrad
typ.
Max. velocity X, Y, Z
10
20
mm/s
Max. velocity θ
X
, θ
Y
, θ
Z
250
500
mrad/s
Typ. velocity X, Y, Z
5
10
mm/s
Typ. velocity θ
X
, θ
Y
, θ
Z
120
250
mrad/s
Mechanical properties
Stiffness X / Y
0.7
0.7
N/µm
Stiffness Z
8
8
N/µm
Load (base plate horizontal / any
orientation)
5 / 2.5
5 / 2.5
kg
max.
Holding force, de-energized (base
plate horizontal / any orientation)
15 / 2.5
15 / 2.5
N
max.
Motor type
Brushless DC motor Brushless DC motor
Miscellaneous
Operating temperature range
0 to 50
0 to 50
°C
Material
Stainless steel,
aluminum
Stainless steel,
aluminum
Mass
2.2
2.2
kg
±5 %
Cable length
2
2
m
±10 mm