6.1
6.2
6.2.1 Operation without operating unit
6.2.2 Operation via connection "E74"
6.2.3 Operation via multi-function connection "X3"
6.2.4 Operation via Pfeiffer Vacuum display and control unit
6.2.5 Operation via field bus
6.3
6.4
6.4.1 Operating mode display via LED
6.4.2 Temperature monitoring
6.5
6.5.1 Switching off
6.5.2 Venting
7
7.1
General maintenance information
7.2
Maintenance intervals and responsibilities
7.3
Replacing the operating fluid reservoir
7.3.1 Removing the operating fluid reservoir
7.3.2 Install operating fluid reservoir
7.4
Replace the electronic drive unit
7.4.1 Removing electronic drive unit
7.4.2 Install the electronic drive unit
7.5
Confirming the rotation speed specification
8
8.1
Shutting down for longer periods
8.2
8.3
9
10
Service solutions from Pfeiffer Vacuum
11
12
12.2 Ordering accessories
13
13.1 General
13.2 Technical data
13.3 Dimensions
Table of contents
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