5.5 Connecting the electrical supply
WARNING
Risk of danger to life through missing mains disconnection device
The vacuum pump and electronic drive unit are
not
equipped with a mains disconnection device
(mains switch).
► Install a mains disconnection device according to SEMI-S2.
► Install a circuit breaker with an interruption rating of at least 10,000 A.
WARNING
Risk of injury due to incorrect installation
Dangerous situations may arise from unsafe or incorrect installation.
► Do not carry out your own conversions or modifications on the unit.
► Ensure the integration into an Emergency Off safety circuit.
5.5.1 Ground turbopump
Pfeiffer Vacuum recommends connecting a suitable grounding cable to discharge applicative interfer-
ences.
M4
Fig. 12:
Example: Connecting the grounding cable
Procedure
1. Use the turbopump ground terminal (M4 female thread).
2. Route the connection in accordance with locally applicable provisions.
5.5.2 Establishing the electric connection
DANGER
Danger to life from electric shock
Power supply packs that are not specified or are not approved will lead to severe injury to death.
► Make sure that the power supply pack meets the requirements for double isolation between
mains input voltage and output voltage, in accordance with IEC 61010 and IEC 60950.
► Make sure that the power supply pack meets the requirements in accordance with IEC 61010
and IEC 60950.
► Where possible, use original power supply packs or only power supply packs that correspond
with the applicable safety regulations.
Installation
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