5
3.2. Fitting The Exhaust Line
When fitting the exhaust line take account of the
instructions in the operating instructions for the
backing pump (Operating Instructions
MVP 015-2; PU 0012 BN).
The exhausted process gases and vapours can
represent a health hazard and can also be envi-
ronmentally damaging.
Comply with all the gas manufacture's safety
instructions.
3.1. Preparations For Installation
Do not carry out any unauthorized
modifications or alterations to the turbo pumping
station.
– Only remove the blank flange on the high and fore-vacuum
side immediately before connecting.
– The lubricant reservoir on turbopumps is fitted and filled
ready for operation.
– Permissible magnetic field
≤
4 mT.
– Set up the pumping station on a horizontal surface.
– In order to avoid the build-up of heat when operating the
pumping station, the minimum distances to walls and adja-
cent units should be observed (as shown in the following
illustration).
3. Installation
50
50
3.3. Venting Units
Turbomolecular Drag Pumps TMH/TMU 071 P can be
manually vented with the venting screw (condition on
delivery).
Venting time to atmospheric pressure minimum
30 seconds.
Venting Valve TVF 005 (Accessory)
The Venting Valve TVF 005 can be used in conjuction with the
TC 600 to vent the TMH/TMU 071 P.
Control is via the setting which has been pre-selected on the
Electronic Drive Unit TC 600.
The venting mode on the TVF 005 is selectable via the
DCU 001.
(Dimensions in mm)
