Technical data and dimensions
17
Conversion table
11.5 Gas correction factor
In case of different gases, accurate determination is only possible with a partial pressure
measurement instrument, e. g. a quadrupole mass spectrometer.
Fig. 9:
Measurement curve TPR 270 (Pirani)
Correction factor for the pressure range < 1 hPa
Measuring signal U
[V]
Pressure p
[hPa]
< 0.5
Sensor error
0.5 ... 1.5
Underrange
1.5
2.5
3.5
4.5
5.5
6.5
7.5
8.5
1 · 10
-4
1 · 10
-3
1 · 10
-2
0.1
1.0
10
100
1000
8.5 ... 10.3
Overrange
He 1.00
Ne
1.40
Ar
1.60
Kr
2.40
N
2
1.00
Luft 1.00
H
2
0.57
CO
1.0
CO
2
0.89
Correction factor K for the linear range:
p
eff
= K x indicated pressure
10
2
8
6
4
2
10
1
8
6
4
2
10
0
8
6
4
2
10
–1
8
6
4
2
10
–2
8
6
4
2
10
–3
p
eff
[hPa]
10
–3
2
4
6
10
–2
2
4
6
10
–1
2
4
6
10
0
2
4
6
10
1
2
4
6
10
2
H
2
He
Ne
Xe
Kr
Ar
CO
2
Freon 12
Luft / Air
O
2
CO
N
2
H
2
O
p [hPa]
