background image

Zentrale/Headquarters

Pfeiffer Vacuum GmbH

Emmeliusstrasse 33
D-35614 Asslar

Telefon 06441/802-0
Telefax 06441/802-202
Hotline 06441/802-333
Internet:
http://www.pfeiffer-vacuum.de

Greece

Analytical Instruments S.A., 1 Mantzarou St.,
GR-15451 Athens, 
tel30 / 1 674 8973
t30 / 1 674 8978

India

Pfeiffer Vacuum India Ltd.
25-E Nicholson Road, Tarbund
Secunderabad 500 009, 
tel91 / 40 775 0014, t91 / 40 775 7774

Israel

ODEM Scientific Applications,
2 Bergman Street, Science based park
Rehovod
tel972 8 9366 101,
t972 8 9366 102

Italy

Pfeiffer Vacuum Italia S.p.a.
Via San Martino, 44  I-20017 RHO (Milano)
tel39 / 2 93 99 051, t39 / 2 93 99 05 33

Japan

Hakuto Co. Ltd., C.P.O. Box 25,
Vacuum & Scientific Instruments Division
Tokyo Central 100-91,
tel81 / 3 32 258 910
t81 / 3 32 259 009

Korea

Pfeiffer Vacuum Korea Ltd., 3F Haein Building 453,
Dokok-Dong, Kang Nam-Ku, Seoul, 135-270
tel82 / 2 3461 0671/5
t82 / 2 3461 0676

Netherlands

Pfeiffer Vacuum Nederland BV
Veldzigt 30a, NL-3454 PW De Meern,
tel31 / 30 6666050, t31 / 30 6662794

Peru

Ing. E. Brammertz s.r.l., José Pardo 182,
Apartado 173, PE-18 Miraflores,
tel51 / 1 445 8178
t51 / 1 445-1931

Poland

Softrade Sp.z.o.o, ul. Malwowa 35,
PL-60-175 Poznan, tel48 / 61 8677 168,
t48 / 61 8677 111

Portugal

Unilaser Lda, Taguspark
Núcleo Central, sala n

o

268, Estrada Cacém-

Porto Salvo, P-2780 Oeiras
tel351 / 1 421 7733
t351 / 1 421 7744

Singapore

APP Systems Services Pte. Ltd, 2 Corporation Road
06-14 Corporation Place, Singapore 618494,
tel65 / 268 2024, t65 / 268 6621

Spain

Tecnovac
Tecnologia de Vacio S.L., Ronda de Poniente, 6 Bajo F
Centro Empresarial Euronova
E-28760 Tres Cantos (Madrid)
tel34 / 91 804 11 34,
t34 / 91 804 30 91

Sweden

Pfeiffer Vacuum Scandinavia AB
Johanneslundsvägen 3
S-194 61 Upplands Väsby
tel46 / 590 748 10
t46 / 590 748 88

Switzerland

Pfeiffer Vacuum Schweiz S.A.
Förrlibuckstraße 30, CH-8005 Zürich
tel41 / 1 444 2255,
t41 / 1 444 2266

South Africa

Labotec Pty Ltd., P.O. Box 6553,
Halfway House
1685 Midrand
tel27 / 11 315 5434
t27 / 11 315 5882

Taiwan

S & T Hitech Ltd. Hsinchu office
No. 103, Hsien Chen 11th Street, Jubei City,
HsinChu County, Taiwan, R.O.C.
(zip/postal code: 302)
tel886 / 3 554 1020 
t886 / 3 554 0867

Thailand

S & T Enterprises (Thailand) Ltd.
18th Floor, Chokchail Intíl Bldg.
690 Sukhumvit Road
Klongton, Klongtoey
Bangkok 10110 
tel662 / 259 4623 
t662 / 259 6243

U.S.A.

Pfeiffer Vacuum, Inc.
24 Trafalgar Square
Nashua, NH 03063-1988
USA
tel1/ 603 578 6500
t1/ 603 578 6550

Venezuela

Secotec S.A., Apartado 3452, Caracas 1010-A,
tel58 / 2 573 8687
t58 / 2 573 1932

Other countries

AVI - Applied Vaccuum Industries GmbH
Leginglenstrasse 17A; CH-7320 Sargans
Switzerland
tel41 / 81 710 03 80
t41 / 81 710 03 81

Scope of represented countries

Armenia, Azerbaijan, Bangladesh, Belarus, Bulgaria,
Cambodia, Estonia, Georgia, Hong Kong, Kazakhstan,
Kingdom of Nepal, Kirghizia, Latvia, Lithuania,
Maldavia, Philippines, P.R. China, Rumania, Russia,
Tajikistan, Turkmenistan, Ukraine, Uzbekistan, Vietnam

A.E.M.S.
Advanced Equipment Materials and Systems
P.O. Box 25
Föhrenweg 18
FL-9496 Balzers
tel41 / 75 380 0550
t41 / 75 380 0551

Scope of represented countries

Bahrain, Egypt, Iraq, Iran, Jordan, Kuwait, Lebanon,
Lybia, Oman, Pakistan, Saudi-Arabia, Sudan, Syria,
Turkey, United Arab Emirates, Yemen

Argentina

ARO S.A., Casilla de Correo 4890,
1000 Buenos Aires, tel54 / 1 331 3918,
t54 / 1 331 3572

Australia

Balzers Australia Pty. Ltd., Level 1,
3, Northcliff Street, Milsons Point, NSW 2061,
tel61 / 2 9954 1925, t61 / 2 9954 1939

Austria

Pfeiffer Vacuum Austria GmbH
Diefenbachgasse 35, A-1150 Wien,
tel43 / 1 8941 704, t43 / 1 8941 707
Service Hotline: +43 / 1 8941704

Branch Office, Czech Republic

Pfeiffer Vacuum Austria GmbH, Branch Prague
Zvonarska 885
CZ-156 00 Praha 5
tel 420/2 900 42981
t 420/2 579 23014

Belgium / Luxemburg

Pfeiffer Vacuum Belgium N.V./S.A.
Luxemburgstraat 5, B-1940 Temse
tel32 / 3 710 5920, t32 / 3 710 5929
Service Hotline: +32 / 3 710 5922

Brazil

Elmi Tec
Assistencia Técnica e Representação S/C Ltda.
Rua Bernadino de Compos, 551
CEP 04620-002 São Paulo, SP - Brasil
tel55 / 11 532 0740
t55 / 11 535 3598

Chile

BERMAT S.A., Coyancura 2283, piso 6 
Providencia, P.O. Box 9781, Santiago
tel56 / 2 231 8877,
t56 / 2 231 4294

Colombia

Arotec Colombiana S.A., Carrera 15 No.38-17
P.O. Box 050 862, Santafe de Bogota  /  D.C.
tel57 / 1 288 7799, t57 / 1 285 3604

Denmark

Pfeiffer Vacuum Scandinavia AB, Vesterengen 2,
DK-2630 Taastrup, 
tel45 / 43 52 38 00
t45 / 43 52 38 50

France

Pfeiffer Vacuum France SAS
45, rue Senouque, BP 139   F-78531 BUC Cedex
tel33 / (0)1 30 83 04 00
t33 / (0)1 30 83 04 04

Germany

Pfeiffer Vacuum GmbH,
Emmeliusstrasse 33, D-35614 Asslar
tel49 / 6441 802 400
t49 / 6441 802 399
Service Hotline: +49 / 6441 802 333

Great Britain

Pfeiffer Vacuum Ltd.
Bradbourne Drive, Tilbrook,
Milton Keynes, MK7 8AZ, United Kingdom
tel44 / 1 908 373 333
t44 / 1 908 377 776

(0008)

Summary of Contents for TPH 2201

Page 1: ...Operating Instructions Turbomolecular Pumps With Electronic Drive Units TPH 2201 TPU 2201 PM 800 567 BE C 0008...

Page 2: ...The Lubricant 13 4 2 Before Switching ON 13 4 3 Switching ON 13 4 4 Circulatory Lubrication 14 4 5 Heating 14 4 6 Switching OFF And Venting 14 4 7 Gas Type Dependent Operations 14 4 8 Shutting Down Fo...

Page 3: ...ell away from hot surfaces 70 C Operate the turbopump with TC 600 only in conjunction with the relevant Power Pack Unit accessory The unit has been accredited protection class IP 30 When the unit is o...

Page 4: ...the pump is to be operated with more than 50 of the permissible gas load sealing gas must be used The turbopump must be connected to a backing pump in accordance with Section 3 3 Only PFEIFFER power...

Page 5: ...duce the volume flow rate of the pump by approximately 15 For fitting splinter shields please refer to Fitting the splinter shield The high vacuum side can be flanged onto the vacuum cham ber either d...

Page 6: ...hloride content max 100 mg kg Carbonate hardness max 10 dH Conaumption of potassium permanganate max 10 mg kg Carbon dioxide Undetectable Ammonia Undetectable pH value 7 9 Max fore line over pressure...

Page 7: ...TMS of the TC 600 8 on the turbopump Connect mains cable 46c to the mains voltage Caution Ensure correct mains voltage range The electrical connections must be carried out by qualified personnel in c...

Page 8: ...8b Connect plug X2 on connecting cable 8a with Power Pack Unit TPS 600 DCU 600 Accessories on connection X2 Once operations voltage has been supplied the TC 600 performs a self test on the supply volt...

Page 9: ...ial Interface RS 485 see Section 4 10 Rotation Speed Setting Mode 8 Output low Output high rotation speed set rotation speed switchpoint attained switchpoint not attained output can be loaded with 24...

Page 10: ...5 RS 485 D DO RI 6 Gnd 7 RS 485 D DO RI 8 not connected All units connected to the bus must have differing serial inter face addresses parameter 797 The group address of the TC 600 is 960 Only safety...

Page 11: ...11 3 12 Connections Diagram 1 1...

Page 12: ...12 Connection Diagram For 3 phase Backing Pump...

Page 13: ...he remote control plug Turbopump rotors rotate at high speed When the high vacuum flange is open there is a dan ger of injury and of damage to the pump caused by objects falling into the pump Therefor...

Page 14: ...ing To avoid contamination occurring when switching off the pump should be vented before shut down Switch off both turbopump and backing pump on the power pack unit at the same time with switch S1 Wit...

Page 15: ...se see Section 3 10 point 5 Reset Standby The pump can be operated optionally at 66 of its nominal rotation speed standby ON or at its nominal rotation speed standby OFF Close fore vacuum and venting...

Page 16: ...unction and warning signals are only possible with the use of the DCU Switching Outputs Switching outputs 1 and 2 can be loaded with a maximum 24 V 50 mA per output The following functions are assigne...

Page 17: ...nsufficient water flow Ensure free flow Insufficient air supply Ensure adequate air supply Fore vacuum pressure too high Reduce fore vacuum pressure Ambient temperature too high Reduce ambient tempera...

Page 18: ...49 Part 173 240 Definition and Preparation We will carry out the decontamination and invoice this work to you if you have not attached this note This also applies where the operator does not have the...

Page 19: ...h the respective regulations Safety instructions data sheet on request 8 2 Cleaning Strainer And Floater The strainer 81 and the floater 79 must be cleaned in pure alcohol after every lubricant replac...

Page 20: ...73 Sight glass 74 O ring 75 O ring 76 O ring 77 Lubricant pump 78 Ball bearing 78a Pump shaft 79 Floater 80 Locking screw 81 Strainer 82 Securing screw 83 Supply cable 84 Bearing mounting 86 Screw 87...

Page 21: ...x power characteristics lines2 A W Hz 560 600 B W Hz 560 600 C W Hz 560 600 D W Hz 560 600 Final pressure3 with rotary vane vacuum pump mbar 1 10 9 Lubricant Type4 TL 011 oder F3 Filling volume cm3 2...

Page 22: ...71 Lubricant filler screw 2 A2 50 G1 8 A N 3191 382 X 72 Lubricant drain screw 2 A2 50 G1 8 A N 3191 382 X 73 Sight glass 2 PM 003 251 74 O ring 2 57 x 2 5 P 4070 853 PP 75 O ring 4 6 x 2 2 P 4070 08...

Page 23: ...23 Spare parts...

Page 24: ...afety plug 230 V P 4564 309 ZA UL plug 208 V P 4564 309 ZF UL plug 115 V P 4564 309 ZE Operating and Display Control Unit DCU 001 PM 041 816 T PM 800 477 BN Relay box backing pump 1 phase 16 A Safety...

Page 25: ...006 032 AT 1 l PM 006 033 AT F3 0 05 l PM 006 336 T 0 25 l PM 006 313 T When ordering accessories and spare parts please be sure to state the full part number When ordering spare parts please state ad...

Page 26: ...he repair and or service of vacuum components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay The manufacturer could refuse to acce...

Page 27: ...by certify that the product specified below is intended for installation in a machine which is forbidden to be put into operation until such time as it has been determined that the end product is in a...

Page 28: ...662 259 4623 telefax 662 259 6243 U S A Pfeiffer Vacuum Inc 24 Trafalgar Square Nashua NH 03063 1988 USA telephone 1 603 578 6500 telefax 1 603 578 6550 Venezuela Secotec S A Apartado 3452 Caracas 10...

Reviews: