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5

3. Installation 

3.1. Preparations For Installation

Do not carry out any unauthorised conversions
or alterations to the turbopump.

– The maximum permissible rotor temperature of the pump is

120 °C. If the vacuum chamber or parts in the vacuum
chamber are heated, the values stated in the technical
data relating to the level of heat which may be radiated
into the pump must not be exeeded. If necessary, suitable
shielding must be fitted in the vacuum chamber before the
turbopump (constructional suggestions available on
request).

– Only remove the blank flange from the high and for-vacu-

um side immediately before connection.

– The turbopumps must 

not

be transported when filled with

lubricant.

– Where magnetic fields of > 13.4 mT are involved suitable

shielding must be provided (available on request).

– If the pump is baked out, the body of the pump must be

insulated to prevent burns from accidental contact.

– Both the TPH and TPU 2201 must be anchored to the 

surface.

– In the event of a sudden standstill of the rotor, torques of

up to 8960 Nm can arise and these must be taken up by the
turbopump and frame. Pumps must be anchored as
follows:
– ISO flange with 6 bracket screws,

or

– CF flange with the complete set of M8 screws,

or

– underside of the pump with 6 screws M6,

screws quality 8.8.

3.2. Installing The Pump, 

Connecting The High Vacuum Side

Important

The utmost cleanliness must be observed when fitting all high
vacuum parts. Unclean components prolong the pumping
time.

Use a splinter shield

The use of a splinter shield in the high vacuum flange protec-
ts the turbopump against foreign bodies coming from the
vacuum chamber but does reduce the volume flow rate of the
pump by approximately 15%. For fitting splinter shields please
refer to “Fitting the splinter shield”.

The high vacuum side can be flanged onto the vacuum cham-
ber either directly or via a bellows or a vibration compensator
(see ”Accessories”).

Connecting via bellows

If the high vacuum side is to be flanged via a bellows, the tur-
bopump must be secured for example via the holes on the
underside of the turbopump (please see dimensions). The
fastening must be able to withstand the torque referred to in
Section 3.1.

Connecting Via A Vibration Compensator

The maximum permissible temperature at the
vibration compensator is 100 °C.

Where a vibration compensator is in use, a freely suspended
turbopump can be flanged onto the vacuum chamber.
Additional protective casing must be provided to take up the
energy of the rotor in the event of a malfunction (please
discuss this question with the manufacturer).

The maximum loading capacity of the high vacu-

um flange is 3000 N (equivalent to 300 kg).
This does not apply to pumps with flanges on the
side or below.
Asymmetric loading on the high vacuum flange

must be avoided.

If a vacuum chamber is fitted to the high vacuum flange with-
out support, it must be ensured that no torque is transmitted
to the flange (asymetrical weight of the vacuum chamber).

Even with side and under flanges, pumps can be flanged to
the vacuum chamber with a freely suspended horizontal rotor
shaft. It is a pre-condition that the vacuum chamber be firmly
anchored.

No forces from the piping system must be
allowed to act on the pump where turbopumps
are anchored.
Suspend or support all pipes to the pump.

Fitting The Splinter Shield

Insert the splinter shield in the ISO-K flange in condition on
delivery.

Inserting the splinter shield in ISO-K flage

A

Strap (Condition on delivery)

A

Summary of Contents for TPH 2201

Page 1: ...Operating Instructions Turbomolecular Pumps With Electronic Drive Units TPH 2201 TPU 2201 PM 800 567 BE C 0008...

Page 2: ...The Lubricant 13 4 2 Before Switching ON 13 4 3 Switching ON 13 4 4 Circulatory Lubrication 14 4 5 Heating 14 4 6 Switching OFF And Venting 14 4 7 Gas Type Dependent Operations 14 4 8 Shutting Down Fo...

Page 3: ...ell away from hot surfaces 70 C Operate the turbopump with TC 600 only in conjunction with the relevant Power Pack Unit accessory The unit has been accredited protection class IP 30 When the unit is o...

Page 4: ...the pump is to be operated with more than 50 of the permissible gas load sealing gas must be used The turbopump must be connected to a backing pump in accordance with Section 3 3 Only PFEIFFER power...

Page 5: ...duce the volume flow rate of the pump by approximately 15 For fitting splinter shields please refer to Fitting the splinter shield The high vacuum side can be flanged onto the vacuum cham ber either d...

Page 6: ...hloride content max 100 mg kg Carbonate hardness max 10 dH Conaumption of potassium permanganate max 10 mg kg Carbon dioxide Undetectable Ammonia Undetectable pH value 7 9 Max fore line over pressure...

Page 7: ...TMS of the TC 600 8 on the turbopump Connect mains cable 46c to the mains voltage Caution Ensure correct mains voltage range The electrical connections must be carried out by qualified personnel in c...

Page 8: ...8b Connect plug X2 on connecting cable 8a with Power Pack Unit TPS 600 DCU 600 Accessories on connection X2 Once operations voltage has been supplied the TC 600 performs a self test on the supply volt...

Page 9: ...ial Interface RS 485 see Section 4 10 Rotation Speed Setting Mode 8 Output low Output high rotation speed set rotation speed switchpoint attained switchpoint not attained output can be loaded with 24...

Page 10: ...5 RS 485 D DO RI 6 Gnd 7 RS 485 D DO RI 8 not connected All units connected to the bus must have differing serial inter face addresses parameter 797 The group address of the TC 600 is 960 Only safety...

Page 11: ...11 3 12 Connections Diagram 1 1...

Page 12: ...12 Connection Diagram For 3 phase Backing Pump...

Page 13: ...he remote control plug Turbopump rotors rotate at high speed When the high vacuum flange is open there is a dan ger of injury and of damage to the pump caused by objects falling into the pump Therefor...

Page 14: ...ing To avoid contamination occurring when switching off the pump should be vented before shut down Switch off both turbopump and backing pump on the power pack unit at the same time with switch S1 Wit...

Page 15: ...se see Section 3 10 point 5 Reset Standby The pump can be operated optionally at 66 of its nominal rotation speed standby ON or at its nominal rotation speed standby OFF Close fore vacuum and venting...

Page 16: ...unction and warning signals are only possible with the use of the DCU Switching Outputs Switching outputs 1 and 2 can be loaded with a maximum 24 V 50 mA per output The following functions are assigne...

Page 17: ...nsufficient water flow Ensure free flow Insufficient air supply Ensure adequate air supply Fore vacuum pressure too high Reduce fore vacuum pressure Ambient temperature too high Reduce ambient tempera...

Page 18: ...49 Part 173 240 Definition and Preparation We will carry out the decontamination and invoice this work to you if you have not attached this note This also applies where the operator does not have the...

Page 19: ...h the respective regulations Safety instructions data sheet on request 8 2 Cleaning Strainer And Floater The strainer 81 and the floater 79 must be cleaned in pure alcohol after every lubricant replac...

Page 20: ...73 Sight glass 74 O ring 75 O ring 76 O ring 77 Lubricant pump 78 Ball bearing 78a Pump shaft 79 Floater 80 Locking screw 81 Strainer 82 Securing screw 83 Supply cable 84 Bearing mounting 86 Screw 87...

Page 21: ...x power characteristics lines2 A W Hz 560 600 B W Hz 560 600 C W Hz 560 600 D W Hz 560 600 Final pressure3 with rotary vane vacuum pump mbar 1 10 9 Lubricant Type4 TL 011 oder F3 Filling volume cm3 2...

Page 22: ...71 Lubricant filler screw 2 A2 50 G1 8 A N 3191 382 X 72 Lubricant drain screw 2 A2 50 G1 8 A N 3191 382 X 73 Sight glass 2 PM 003 251 74 O ring 2 57 x 2 5 P 4070 853 PP 75 O ring 4 6 x 2 2 P 4070 08...

Page 23: ...23 Spare parts...

Page 24: ...afety plug 230 V P 4564 309 ZA UL plug 208 V P 4564 309 ZF UL plug 115 V P 4564 309 ZE Operating and Display Control Unit DCU 001 PM 041 816 T PM 800 477 BN Relay box backing pump 1 phase 16 A Safety...

Page 25: ...006 032 AT 1 l PM 006 033 AT F3 0 05 l PM 006 336 T 0 25 l PM 006 313 T When ordering accessories and spare parts please be sure to state the full part number When ordering spare parts please state ad...

Page 26: ...he repair and or service of vacuum components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay The manufacturer could refuse to acce...

Page 27: ...by certify that the product specified below is intended for installation in a machine which is forbidden to be put into operation until such time as it has been determined that the end product is in a...

Page 28: ...662 259 4623 telefax 662 259 6243 U S A Pfeiffer Vacuum Inc 24 Trafalgar Square Nashua NH 03063 1988 USA telephone 1 603 578 6500 telefax 1 603 578 6550 Venezuela Secotec S A Apartado 3452 Caracas 10...

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