14 Technical data and dimensions
14.1 General
This section describes the basis for the technical data of Pfeiffer Vacuum turbopumps.
Technical data
Maximum values refer exclusively to the input as a single load.
● Specifications according to PNEUROP committee PN5
● ISO 27892 2010:"Vacuum technology - Turbomolecular pumps - Measurement of rapid shutdown
torque"
● ISO 21360 2012: “Vacuum technology - Standard methods for measuring vacuum-pump perform-
ance - Part 1: General description”
● ISO 21360 2018: "Vacuum technology - Standard methods for measuring vacuum-pump perform-
ance - Part 4: Turbomolecular vacuum pumps"
● Ultimate pressure with test dome after 48 h bake out duration
● Gas throughput with water cooling; backing pump = rotary vane pump (10 m
3
/h)
● Cooling water consumption at maximum gas throughput, cooling water temperature 25 °C
● Integral leakage rate with 100 % helium concentration, 10 s measurement duration
● Sound pressure level at distance to vacuum pump = 1 m
mbar
bar
Pa
hPa
kPa
Torr | mm Hg
mbar
1
1 · 10
-3
100
1
0.1
0.75
bar
1000
1
1 · 10
5
1000
100
750
Pa
0.01
1 · 10
-5
1
0.01
1 · 10
-3
7.5 · 10
-3
hPa
1
1 · 10
-3
100
1
0.1
0.75
kPa
10
0.01
1000
10
1
7.5
Torr | mm Hg
1.33
1.33 · 10
-3
133.32
1.33
0.133
1
1 Pa = 1 N/m
2
Tbl. 18:
Conversion table: Pressure units
mbar l/s
Pa m
3
/s
sccm
Torr l/s
atm cm
3
/s
mbar l/s
1
0.1
59.2
0.75
0.987
Pa m
3
/s
10
1
592
7.5
9.87
sccm
1.69 · 10
-2
1.69 · 10
-3
1
1.27 · 10
-2
1.67 · 10
-2
Torr l/s
1.33
0.133
78.9
1
1.32
atm cm
3
/s
1.01
0.101
59.8
0.76
1
Tbl. 19:
Conversion table: Units for gas throughput
14.2 Technical data
Selection field
HiPace® 450 with TC
400, DN 160 ISO-K
HiPace® 450 with TC
400, DN 160 CF-F
Part number
PM P070 501 50
PM P070 511 50
Connection flange (in)
DN 160 ISO-K
DN 160 CF-F
Connection flange (out)
DN 16 ISO-KF / G 3/8"
DN 16 ISO-KF / G 3/8"
Rotation speed ± 2 %
66000 rpm
66000 rpm
Rotation speed variable
60 – 100 %
60 – 100 %
Run-up time
2 min
2 min
Final pressure without gas ballast
≤ 1 · 10
-7
hPa
≤ 5 · 10
-10
hPa
Technical data and dimensions
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