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Pfeiffer Vacuum HiPace 300, Operating Instructions Manual

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Pfeiffer Vacuum HiPace 300 Operating Instructions Manual Download Page 45

4

5

1

2

3

Fig. 21:

Removal of electronic drive unit TC 400

1 Allen head screw

4

Fore-vacuum connection blank flange

2 Electronic drive unit

5

Pump base

3 High vacuum connection protective cover

Procedure

1. Install the turbopump upright if required.
2. Unscrew all 3 Allen head screws from the electronic drive unit.
3. Pull the old electronic drive unit off the turbopump, taking care to keep it straight.

7.4.2 Installing the electronic drive unit

Required tools

● Allen key, 

WAF 3

● Calibrated torque wrench (tightening factor ≤ 1.6)

4

5

1

2

3

Fig. 22:

Installation of electronic drive unit TC 400

1 Allen head screw

4

Fore-vacuum connection blank flange

2 Electronic drive unit

5

Pump base

3 High vacuum connection protective cover

Maintenance

45/64

Summary of Contents for HiPace 300

Page 1: ...OPERATING INSTRUCTIONS EN Translation of the Original HIPACE 450 Turbopump...

Page 2: ...fer vacuum de Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on our website Disclaimer of liability These operating instructions describe all models and varian...

Page 3: ...g 18 3 1 3 Drive 19 3 2 Scope of delivery 19 3 3 Identifying the product 19 3 3 1 Product types 19 3 3 2 Product features 19 4 Transportation and Storage 20 4 1 Transport 20 4 2 Storage 20 5 Installat...

Page 4: ...oir 41 7 3 1 Removing the operating fluid reservoir 42 7 3 2 Assembling the operating fluid reservoir 43 7 4 Replacing the electronic drive unit 44 7 4 1 Removing electronic drive unit 44 7 4 2 Instal...

Page 5: ...ectronic drive unit TC 400 32 Tbl 10 Factory setting of the electronic drive unit for turbopumps when delivered 35 Tbl 11 Behavior and meaning of the LEDs on the electronic drive unit 37 Tbl 12 Factor...

Page 6: ...and through hole 27 Fig 12 Flange connection CF F hexagon head screw and through hole 27 Fig 13 Flange connection CF F stud screw and tapped hole 28 Fig 14 Flange connection CF F stud screw and throu...

Page 7: ...Operating instructions Electronic drive unit TC 400 EC EtherCat PT 0452 BN Declaration of conformity A component of these in structions Current documents are available from the Pfeiffer Vacuum Downloa...

Page 8: ...ace 450 PM P07_ 5_ _ _ _ _ _ _ _ _ _ _ Type 12 IP54 P N n f Mass Made in Germany 20_ _ _ _ PM _ _ _ _ _ _ T 66000 1 min 1100 Hz 7 0 kg D 35614 Asslar Rating plate The rating plate of the turbopump is...

Page 9: ...Light emitting diode FE Functional earth FKM Fluoropolymer rubber P xxx Electronic drive unit control parameters Printed in bold as a three digit number in square brackets Frequently displayed in conj...

Page 10: ...amage to property Is used to highlight actions that are not associated with personal injury Instructions to avoid damage to property Notes tips or examples indicate important information about the pro...

Page 11: ...on moving sharp edged parts when reaching into the open high vacuum flange With the high vacuum flange open access to sharp edged parts is possible A manual rotation of the rotor increases the danger...

Page 12: ...ch on the vacuum pump immediately prior to operation Risks during operation WARNING Risk of burns on hot surfaces when using additional equipment for heating during operation The use of additional equ...

Page 13: ...ng sharp edged parts when reaching into the open high vacuum connec tion Incorrect handling of the turbopump before maintenance work results in hazardous situations with risk of injury There is a risk...

Page 14: ...bopump being sheared off in use The energy that this would release could throw the entire turbopump or shattered pieces from its interior through the surrounding space Potentially dangerous gases can...

Page 15: ...2 Permissible ambient conditions Notes on ambient conditions The specified permissible ambient temperatures apply to operation of the turbopump at maximum permissible backing pressure or at maximum g...

Page 16: ...documents in particular the safety maintenance and repair information 2 7 1 Ensuring personnel qualification Specialist for mechanical work Only a trained specialist may carry out mechanical work Wit...

Page 17: ...intenance level 2 Customer with technical education Pfeiffer Vacuum service technician Maintenance level 3 Customer with Pfeiffer Vacuum service training Pfeiffer Vacuum service technician 2 7 3 Advan...

Page 18: ...nection 5 Turbo rotor 13 Connecting panel of the electronic drive unit 6 Pump housing stainless steel 14 Connecting plug for voltage supply DCin 7 Pump base 15 LED operating mode display 8 Ground term...

Page 19: ...1 Product types The product designation of Pfeiffer Vacuum turbopumps from the HiPace series is composed of the family name the size which is based on the pumping speed of the vacuum pump and if requ...

Page 20: ...weight specified on the rating plate Where possible always transport or ship the turbopump in its original packaging Always carry the turbopump with both hands Remove the protective cover only immedi...

Page 21: ...ing installation Do not start the turbopump with open vacuum connections Always carry out the mechanical installation before electrical connection Prevent access to the high vacuum connection of the t...

Page 22: ...inimum tensile strength of the flange material in all operating states in rela tion to the engagement depth of the fixing screws 170 N mm2 at 2 5 x d 270 N mm2 at 1 5 x d Maximum permissible rotor tem...

Page 23: ...itable for use on vibration sensitive systems WARNING Risk of injury caused by the turbopump breaking away with the vibration compensator in the event of a malfunction Sudden jamming of the rotor gene...

Page 24: ...onto ISO K ISO flange connections For the connection of flanges in ISO KF or ISO K design twisting may occur in the event of sudden blockage of the rotor despite correct installation Leak tightness of...

Page 25: ...d components for the turbopump 6 Screw the hexagon head screws into the tapped holes Observe the minimum tensile strength of the flange material and the screw depth 7 Fasten the hexagon head screws cr...

Page 26: ...ation with ISO F flange are Hexagon head screw and tapped hole Stud screw with tapped hole Stud screw with through hole Required tools Hexagonal wrench 15 WAF Calibrated torque wrench tightening facto...

Page 27: ...pump with collar flange snap ring and centering ring to the counter flange accord ing to the figure 3 Use for all prescribed components for the turbopump 4 Fasten the screw connections cross wise in 3...

Page 28: ...3 If used Insert the protective screen or splinter shield with clamping lugs downwards in the turbo pump high vacuum flange 4 Place the seal exactly in the hollow 5 Connect the flange with the compone...

Page 29: ...from the Pfeiffer Vacuum range In this case the backing pump is also controlled directly via the turbopump electronic drive unit interfaces e g relay box or connection cable Required tools Allen key W...

Page 30: ...if operating with high gas throughput Always use water cooling at ambient temperatures 35 C Parameter Cooling water Appearance filtered mechanically clear visually clear no turbidity no sediment free...

Page 31: ...mpatible accessories for its products Information and ordering options for approved accessories for hybrid bearing turbo pumps can be found online Auxiliary connection to electronic drive unit TC 400...

Page 32: ...ructions for the relevant accessory Note the existing configuration of existing connections Use the Pfeiffer Vacuum display and control unit DCU 002 or a DCU with integrated power supply pack 5 6 Conn...

Page 33: ...e sure that the power supply pack meets the requirements in accordance with IEC 61010 1 IEC 60950 1 and IEC 62368 1 Where possible use original power supply packs or only power supply packs that corre...

Page 34: ...ply voltage 2 Make sure that the power supply pack main switch is off prior to connection 3 Use a suitable connection cable from the Pfeiffer Vacuum accessories range 4 Insert the connecting cable int...

Page 35: ...is set correctly by P 027 in the electronic drive unit Consult Pfeiffer Vacuum before you use gases with higher molecular masses 80 Important settings and function related variables are factory progra...

Page 36: ...d to PLC levels Instructions for remote control operation See the operating instructions of the electronic drive unit for the standard version 6 2 3 Operation via connection E74 Operation is possible...

Page 37: ...injury due to ejected objects Never exceed the permissible 1500 hPa absolute inlet pressure on the suction side or the vent ing and sealing gas connection Make sure that high process related over pres...

Page 38: ...ly lines e g for cooling water or sealing gas 6 5 2 Venting CAUTION Risk of injuries due to contact with vacuum when venting While venting the vacuum pump there is a risk of minor injuries due to the...

Page 39: ...ation in the event of a power failure 50 of rated speed 3600 s 3600 s Tbl 12 Factory settings for delayed venting in turbopumps General information for fast venting We recommend fast venting of larger...

Page 40: ...pen high vacuum connec tion Incorrect handling of the turbopump before maintenance work results in hazardous situations with risk of injury There is a risk of cuts from accessing sharp edged rotating...

Page 41: ...ottom part Partially disassemble the vacuum pump Replace the operating fluid reservoir Replace the bearing hous ing Function test Spare parts package 1 bearing Maintenance level 3 Overhaul Dismantle a...

Page 42: ...id reservoir This information can be found on the pump rating plate You can find the safety data sheet in the Pfeiffer Vacuum Download Center Prerequisites Turbopump off Vacuum system vented to atmosp...

Page 43: ...ed consumables Laboratory gloves Operating fluid reservoir Required tools Allen key WAF 3 Tweezers Calibrated torque wrench tightening factor 1 6 4 5 6 1 2 3 7 Fig 20 Assembling the operating fluid re...

Page 44: ...Protection of electronic devices from electrostatic phenomena Backing up settings made by the customer The factory operating parameters are always preset in replacement units All settings made by the...

Page 45: ...head screws from the electronic drive unit 3 Pull the old electronic drive unit off the turbopump taking care to keep it straight 7 4 2 Installing the electronic drive unit Required tools Allen key W...

Page 46: ...P 777 NomSpdConf parameter in the electronic drive unit HiPace Nominal rotation speed 10 30 60 80 1500 Hz 300 1000 Hz 350 450 1100 Hz 400 700 800 820 Hz Tbl 14 Characteristic nominal rotation speeds o...

Page 47: ...specified temperature range 9 In rooms with humid or aggressive atmospheres Hermetically seal the turbopump together with a drying agent in a plastic bag 8 2 Recommissioning NOTICE Risk of damage to...

Page 48: ...must be disposed of in accordance with the applica ble regulations relating to environmental protection and human health with a view to reducing natural resource wastage and preventing pollution 9 1 G...

Page 49: ...erial approved by Pfeiffer Vacuum for the installation WARNING Risk of injury caused by the turbopump breaking away with the vibration compensator in the event of a malfunction Sudden jamming of the r...

Page 50: ...play and control unit Thermal load due to lack of ventilation water flow too low fore vacuum pressure too high ambient temperature too high Reduce the thermal load Ensure adequate air supply Adjust th...

Page 51: ...ity You can find more detailed information and addresses on our homepage in the Pfeiffer Vacuum Service section You can obtain advice on the optimal solution for you from your Pfeiffer Vacuum represen...

Page 52: ...duct in suitable stable transport containers only e Maintain applicable transport conditions ERKL RUNG KONTAMINIERUNG 6 Attach the contamination declaration to the outside of the packag ing 7 Now send...

Page 53: ...ation Size Part number Remark Pieces 1 Electronic drive unit TC 400 refer to the rating plate depending on the connection panel 1 2 Operating fluid reservoir refer to the rating plate incl capillary r...

Page 54: ...he electronic drive unit of the turbopump enables useful control of backing pumps Depending on the backing pump used different operating modes are available Integrated pressure measurement Evaluation...

Page 55: ...0 with TC 400 and TM 700 TCP 350 PM Z01 312 Air cooling shielded for HiPace 350 450 with TC 400 and TCP 350 PM Z01 374 Water cooling for HiPace 60 P HiPace 80 and for SplitFlow 50 80 with push in fit...

Page 56: ...s measurement duration Sound pressure level at distance to vacuum pump 1 m mbar bar Pa hPa kPa Torr mm Hg mbar 1 1 10 3 100 1 0 1 0 75 bar 1000 1 1 105 1000 100 750 Pa 0 01 1 10 5 1 0 01 1 10 3 7 5 1...

Page 57: ...6000 W min 1 90 66000 W min 1 Performance curve in gas mode 0 vertex D 100 60000 W min 1 100 60000 W min 1 Performance curve in gas mode 1 vertex A 110 66000 W min 1 110 66000 W min 1 Performance curv...

Page 58: ...um max for Ar 10 mbar 10 mbar Fore vacuum max for He 10 mbar 10 mbar Electronic drive unit TC 400 TC 400 Operating voltage DC 24 V 24 V Input voltage tolerance 5 5 Current max 12 5 A 12 5 A Power cons...

Page 59: ...nical data for HiPace 450 with TC 400 24 V 14 3 Characteristics Rotation speed Hz 0 5 10 15 20 25 700 800 900 1 000 1 100 1 200 Gas throughput hPa l s Backing pump HiScroll 18 N hPa l s Ar hPa l s He...

Page 60: ...ia 14 5 Dimensions Dimensions in mm 187 163 173 128 131 HV DN160ISO K n 1 8 0 53 n167 5 n118 M8 6 VV DN16ISO KF 166 7 130 Fig 25 Dimensions HiPace 450 TC 400 DN 160 ISO K 187 163 173 128 131 HV DN 160...

Page 61: ...190 166 176 128 131 H V DN 160 CF F 53 118 M8 6 V V DN 16 ISO KF 169 7 130 Fig 27 Dimensions HiPace 450 TC 400 DN 160 CF F Technical data and dimensions 61 64...

Page 62: ...substances delegated directive 2015 863 EU Harmonized standards and applied national standards and specifications DIN EN ISO 12100 2011 ISO 21360 1 2016 DIN EN 1012 2 2011 ISO 21360 4 2018 DIN EN 6100...

Page 63: ...63 64...

Page 64: ...PT0647 ed F Date 2108 P N PT0647DEN...

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