Orbotech DP-100SL, Site Preparation Manual

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DP-100SL 45
Site Preparation Guide
Imaging Room Issues (cont.d) Complete Pending Date Notes
The ceiling is painted with epoxy, or other
low-porosity, non-shedding, washable paint, or
covered with non-shedding ceiling tiles.
Room is in Clean Room 100,000 class or better
(according to US Federal Std. 209E).
Clean room conditions is prepared prior to system
installation.
All surfaces have a non-reflective matte finish.
The system is not located near heavy machinery.
The amplitude of movement of vibrations must be
less than 1.5 µm at 2 ~ 9 Hz.
The amplitude of acceleration of vibrations is less
than 5 m/s
²
at 9 ~ 200 Hz.
Floor strength is at least 1800 kg/m
².
Floor incline no more than 5 mm per meter
(1” per 16 ft.).
The floor is covered with anti-static tile, rubber or
linoleum. No carpeting.
The Imaging room is its own room with its own
environment (i.e. not part of a bigger room).
Pump Room Issues Complete Pending Date Notes
Pump room size at least:
0.5 x 1 (meters)
1.64 x 3.28 (feet)
Pump room is its own room with its own
environment (must be ventilated!).
Pump installed and connected.