AB-288
Features
Detects Transparent Glass Wafers with a
Trans-parency
The F3M-S allows the mapping of cassettes that have both
silicon wafers and glass wafers. Furthermore, the F3M-S ac-
curately detects inexpensive opaque dummy wafers used for
process checks, thus contributing to cost reductions.
Note: Operating conditions are restricted for the detection of transparent wa-
fers. Contact your OMRON representatives for details.
Automatic Teaching Saves Setting Time Re-
mote Teaching Available
The F3M-S has an automatic teaching function that ensures
easy output adjustments within a minimal time.
Furthermore, the F3M-S has a remote teaching function that
ensures easy output readjustments.
Answerback function during setup and self-
diagnostic function during operation issue
warnings when errors occur!
These alarms contribute to the minimization of system down-
time.
Note: The self-diagnostic output function is not incorporated by the F3M-S826/
-S626.
Prevents Sensor Malfunction and Damage by
OMRON's original optical system, including an emitter and re-
ceiver, is built into the F3M-S. This system prevents Sensor
malfunction and damage by protecting the Sensor from static
electricity that may be charged on semiconductor wafers at
the time of mapping.
Ordering Information
Applicable wafer size
No. of tiers Functions
Model
6 inches (5 inches)
(4.76-mm pitch)
25
F3M-S625
26
---
F3M-S626
8 inches (6.35-mm pitch)
25
F3M-S825
26
---
F3M-S826
12 inches (10-mm pitch)
13
F3M-S1213
25
F3M-S1225
Self diagnostic
Self diagnostic
Self diagnostic
Self diagnostic
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