AB-290
Output Circuit Diagram
Input/output wiring schematic
Pin assignment
* Pin 28 only functions as an answerback output during remote teaching input.
At all other times it functions as a self-diagnostic output, except on the F3M-
S626 and F3M-S826 where it functions as the output of OUT26.
Note: For the F3M-S1213, terminals for pins 16 to 27 are not used.
Precautions
Wiring Considerations
About connection and mounting
The maximum power supply voltage is 24 V DC+10%. Verify
that the power supply voltage does not exceed the maximum
voltage before turning on the power. Use a power supply in
which the secondary circuit is separated by an isolating trans-
former.
●
For adjustment
F3M-S6
@
and F3M-S8
@
F3M-S12
@
The remote or manual automatic teaching of the F3M-S is possi-
ble with the following two sensitivity settings:
Max. Sensitivity Setting: Detects semiconductor silicon wa-
fers, semi-transparent dummy wa-
fers, and SIC wafers.
Teaching with No Sensing Object: Detects transparent wafers
(except F3M-S12
@
).
The sensitivity is set to maximum before shipping. Refer to the
Instruction Manual when setting the sensitivity of the F3M-S.
Answer-back Function and Self-diagnostic
This sensor has a answerback function that warns you of
problems during setup and a self-diagnostic function (on mod-
els other than the F3M-S626 and F3M-S826) that warns you
of errors during operation.
• Answer-back Function: Normal or error teaching output
turns
• Self-diagnostic Function: Warning output turns ON for a de-
crease in optical input.
Time chart for manual setup (when teaching without work)
+V
Output
(OUT 1)
Output
(OUT 26) *
Control output
Stop input
Remote teaching input
0V
Main circuit
* With remote teaching input, output becomes answerback output.
And output becomes self diagnostic output except of F3M-S626/F3M-S826.
F3M-S626 and F3M-S826 are outputted from OUT 26.
Pin
No.
Assignment
Pin
No.
Assignment
Pin
No.
Assignment
1
GND(0V)
11
OUT9
21
OUT19
2
Vcc (12 to 24 V)
12
OUT10
22
OUT20
3
OUT1
13
OUT11
23
OUT21
4
OUT2
14
OUT12
24
OUT22
5
OUT3
15
OUT13
25
OUT23
6
OUT4
16
OUT14
26
OUT24
7
OUT5
17
OUT15
27
OUT25
8
OUT6
18
OUT16
28
Self-diagnostic
output/ OUT26 *
9
OUT7
19
OUT17
29
Control output in-
terrupt
10
OUT8
20
OUT18
30
Remote teaching
input
2 4 6 8 10 12 14 16 18 20 22 24 26 28 30
1 3 5 7 9 11 13 15 17 19 21 23 25 27 29
Correct Use
Teaching
button
Caution indicator (red)
Teaching indicator (orange)
Power supply indicator (green)
Mode Selector
(RUN/TEACH)
Teaching button
Mode Selector (RUN/TEACH)
Caution indicator (red)
Teaching indicator (orange)
Power supply indicator (green)
0.5~2.5s
1s
RUN
TEACH
OPEN
GND
H
L
ON
OFF
ON
OFF
Mode
Selector
Pushed teaching
button
Answer back
function
Teaching indicator
(orange)
Caution indicator
(red)
(Normal)
(Error)
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