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F3M-S

F3M-S

4

Specifications Table

-- continued from previous page

Part number

F3M-S625

F3M-S626

F3M-S825

F3M-S826

F3M-S1213

F3M-S1225

Weight (packed state)

Approx. 110 g

Approx. 200 g

Approx. 300 g

Material

Optical axis

Polycarbonate

Material

Case

ABS

ABS, aluminum (alumite
treated/clear finish)

Cable

Vinyl-insulated, bending type

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Accessories

Spacer and instruction manual

Instruction manual

Note: Operating conditions are restricted for the detection of transparent wafers. Contact your OMRON representatives for details.

J

AUTOMATIC TEACHING FUNCTION

F3M-S6

j

and F3M-S8

j

Power indicator

Warning indicator

Teaching button

RUN/TEACH mode selector Teaching indicator

F3M-S12

j

Power indicator

Warning indicator

Teaching button

RUN/TEACH mode selector

Teaching indicator

The remote or manual automatic teaching of the F3M-S is
possible with the following two sensitivity settings:

1. Max. Sensitivity Setting: Detects semiconductor silicon

wafers, translucent dummy wafers, and SIC wafers.

2. Teaching with No Target Object: Detects transparent wafers

(except F3M-S12

j

).

The sensitivity is set to maximum before shipping. Refer to the
Instruction Manual when setting the sensitivity of the F3M-S.

J

ANSWER-BACK FUNCTION AND

SELF-DIAGNOSTIC FUNCTION

The F3M-S has an answer-back function to warn the user about
setting errors and a self-diagnostic function (except F3M-S626
and F3M-S826) to warn the user about operational errors.

x

Answer-back Function: Normal or error teaching output turns
ON.

x

Self-diagnostic Function: Warning output turns ON for a
decrease in optical input.

Summary of Contents for F3M-S Series

Page 1: ...s with a Transparency of 92 F3M S6j and F3M S8j The F3M S allows the mapping of cassettes that have both silicon wafers and glass wafers The F3M S also accurately detects dummy wafers in the carrier u...

Page 2: ...Green indicator is ON when power is being supplied Warning Red indicator is ON under the following conditions Teaching no sensing object insufficient light or error Response time 10 ms max Control out...

Page 3: ...icator Warning indicator Teaching button RUN TEACH mode selector Teaching indicator The remote or manual automatic teaching of the F3M S is possible with the following two sensitivity settings 1 Max S...

Page 4: ...ent 1 GND 0 V 16 OUT14 2 VCC 12 to 24 V 17 OUT15 3 OUT1 18 OUT16 4 OUT2 19 OUT17 5 OUT3 20 OUT18 6 OUT4 21 OUT19 7 OUT5 22 OUT20 8 OUT6 23 OUT21 9 OUT7 24 OUT22 10 OUT8 25 OUT23 11 OUT9 26 OUT24 12 OU...

Page 5: ...ons 50 1 97 18 5 0 71 135 5 31 14 0 55 3 94 4 72 50 1 97 18 5 0 71 135 5 31 14 0 55 3 94 4 72 J F3M S625 J F3M S626 J F3M S825 J F3M S826 Optical axis Side mark Thirty 19 0 08 dia vinyl insulated flat...

Page 6: ...vibration or shock directly affecting the Sensor J CONNECTION AND MOUNTING x A maximum of 24 VDC 10 can be imposed on the F3M S Check that the voltage of the power supply is within the per missible ra...

Page 7: ...ne East Commerce Drive Schaumburg IL 60173 NOTE DIMENSIONS SHOWN ARE IN MILLIMETERS To convert millimeters to inches divide by 25 4 1 800 55 OMRON OMRON CANADA INC 885 Milner Avenue Scarborough Ontari...

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