7
D6F-series MEMS Flaw Sensor User’s Manual (A286)
5 Product Features
・
Mass Flow Sensing
・
Wide Range Sensing Ability
・
Low Power Consumption
・
Ultra Small Size of MEMS Sensor
5.1 Characteristics of flow sensors
Table3. Representative Specifications Example of Mass Flow Sensor (D6F-
□□
A1-110)
Type
Type D6F-01A1-110
Type D6F-02A1-110
Flow range
＊
1
0
～
1 L/min
0
～
2 L/min
Application medium
＊
2
Air
Port style
Bamboo Joint
Max Size
：
φ8.6mm ,
Min Size
：
φ7.4mm
Electrical connection
Connector (three wires)
Power supply voltage
DC10.8
～
26.4V
Current consumption
Max. 15mA, No load, Vcc=12
～
24V at 25
℃
Output signal
DC1
～
5V (Non-linear output, Resistive load 1
0kΩ
)
Accuracy
±3
％
F.S (at 25
℃
)
Repeatability
＊
3
±0.3
％
F.S.
Max. output voltage
DC5.7V (Resistive load
10kΩ
)
Min. output voltage
DC0V (Resistive load 1
0kΩ
）
Absolute maximum supply voltage
DC26.4V
Absolute maximum output voltage
DC6V
Case material
PPS
Protecting structure
IP40 (IEC standard)
Maximum permission pressure
200kPa
Pressure drop
＊
3
0.42kPa
10.6kPa
Operating temperature
－
10
～＋
60
℃
(with no ice or no dew condensation)
Operating humidity
35
～
85
％
RH (with no dew condensation)
Storage temperature
－
40
～＋
80
℃
(with no ice or no dew condensation)
Storage humidity
35
～
85
％
RH (with no dew condensation)
Temperature characteristics
Within ±3
％
F.S. of detected characteristics of at 25
℃
Over ambient temperature rang
－
10
～＋
60
℃
Insulation resistance
Min.
20MΩ
(DC500, between lead terminal and the base)
Withstanding voltage
AC500V 50/60Hz for one minute between the lead terminals
and the base (Leakage current is 1mA max.)
Weight
12.8g
＊
1. L/min (Normal) means the volumetric flow rate at 0degC, 101.3kPa. (1 atm)
＊
2. Use clean and dry gas without a dust and an oil mist.
＊
3. Reference Value (Typical value)
