1
D6F-series MEMS Flaw Sensor User’s Manual (A286)
INDEX
1
OUTLINE ........................................................................................................................................ 2
2
WHAT IS A FLOW SENSOR? ....................................................................................................... 2
3
STRUCTURE ................................................................................................................................. 2
3.1
B
ASIC COMPOSITION OF FLOW SENSORS
.................................................................................... 2
3.2
F
LOW
S
ENSOR
P
RODUCT
L
INEUP
.............................................................................................. 3
4
OPERATING PRINCIPLE .............................................................................................................. 4
4.1
B
ASIC STRUCTURE OF
MEMS
FLOW SENSOR CHIP
..................................................................... 4
4.2
D
ETECTING PRINCIPLE OF MASS FLOW SENSOR
.......................................................................... 6
5
PRODUCT FEATURES ................................................................................................................. 7
5.1
C
HARACTERISTICS OF FLOW SENSORS
...................................................................................... 7
5.1.1
Detection range of flow sensors ...................................................................................... 8
5.1.2
Output signal (operating characteristics) ......................................................................... 8
5.1.3
Permission pressure performance .................................................................................. 9
5.1.4
Repeatability .................................................................................................................... 9
6
USAGE OF FLOW SENSOR ........................................................................................................ 9
6.1
E
LECTRICAL
C
ONNECTION
......................................................................................................... 9
6.2
P
ORT STYLE AND INSTALLATION METHOD
.................................................................................. 10
6.2.1
Screw type ..................................................................................................................... 10
6.2.2
Quick fastener type ........................................................................................................ 10
6.2.3
Manifold mount type ....................................................................................................... 11
6.2.4
Bamboo type.................................................................................................................. 12
6.3
A
TTENTION FOR PIPING AND CONNECTION
................................................................................ 13
6.3.1
Cleanup of the inflow gas .............................................................................................. 13
6.3.2
Stabilization.................................................................................................................... 13
6.3.3
Measurement of high flow ............................................................................................. 13
6.3.4
Consideration of the laminar flow .................................................................................. 14
6.4
T
HE INFLUENCE OF ENVIRONMENT
........................................................................................... 14
6.4.1
Temperature characteristics .......................................................................................... 15
6.4.2
The influence of dust ..................................................................................................... 15
6.4.3
The influence of pressure and temperature .................................................................. 16
6.4.4
The influence of the mounting direction ........................................................................ 16
6.4.5
Output changes in various gases .................................................................................. 17
6.4.6
The behavior in over flow rate range ............................................................................. 17
6.4.7
The influence of humidity .............................................................................................. 17
6.5
A
PPLICATION EXAMPLE
............................................................................................................ 18
7
GLOSSARY ................................................................................................................................. 19
8
WARRANTY AND LIMITED LIABILITY ...................................................................................... 21
