MX61/MX61L
2
5. The desktop surface on which the microscope system is installed should be almost horizontal with a tilting angle of less
than 20’ with the MX61L or less than 1° with the MX61 (to prevent spontaneous displacement of the stage) and rigid.
(The weight of the microscope system with standard module combination is about 53 kg, or 116.6 lbs, with the MX61L and
about 44 kg, or 96.8 lbs, with the MX61.)
}Although these microscopes are designed with excellent vibration resistance, their maximum performance can be
achieved when an anti-vibration bench is used.)
6. The lamp housing surface at the rear of the microscope frame will become very hot during operation. When installing the
microscope, ensure that there are ample free spaces (of more than 100 mm) around and in particular above and below
the lamp housing. Also, the power cord and other cables should be laid out at distances from the microscope because
contact with them may result in their fusion and an electric shock due to it.
7. To avoid a potential shock hazard, make sure that the power cord is safety
grounded/earthed
.
8. To allow each microscope manifest its full performance, reserve an installation space having the minimum dimensions
described below before assembly and installation of the microscope. (Sizes in )
}The dimensions of the area enclosed in alternate long and two short dashes lines indicate the stage movement range.
The dimensions marked
*
are variable depending on the lamp housing used.
}When maintenance is required, a larger work space can be prepared by changing the observation tube orientation or
moving the stage.
}The following installation space is set according to the SEMI standard guidelines (SEMI S8-1103). It is recommended
that you set the optimum installation space for each customer by referring to the following installation space data as
well as the appearance of the system, eye point height, etc.
MX61L installation space
Unit: mm
MX61L
Stage movement
range
Installation space
